Slit Valve XGT Series

For 200 mm wafer For 300 mm wafer 529

Compact Cylinder with Lock Series CLQ

L M5 x 60 L 165 180 200 60 CNS CLQB40-10D CLQB100-10D M5 x 75 L M8 x 90 L M10 x 115 L x 65 L 75 90 115 65 -15D -15D x 80 L x 95 L x 120 L x 70 L 80 95 120 70 CLS -20D -20D x 85 L x 100 L x 125 L x 75 L 85 100 125 75 -25D -25D x 90 L x 105 L x 130 L x 80 L 90 105 130 80 8.5 CLQ -30D -30D x 95 L x 110 L x 135 L x 85 L 95 110 135 85 -35D -35D 8.5 15.5 16.5 x 100 L x 115 L x 140 L x 90 L 100

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

A90 100 V Grommet IC circuit 100 V or less B54 B64 (B54) (B64) 100 V, 200 V Relay, PLC 12 V 24 V 2-wire 200 V or less C73C C80C Connector 24 V or less IC circuit Diagnostic indication (2-color indication) (B59W) B59W Grommet Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto

MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, 25, 50, 75, 100, 125, 150, 200 Up to 1500 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

A90 B54 B64 C73C C80C A33A A34A A44A B59W 100 V 100 V or less 100 V, 200 V 200 V or less 24 V or less IC circuit Grommet Relay, PLC 12 V Connector 2-wire 24 V IC circuit PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

A90 100 V Grommet IC circuit 100 V or less None B54 B64 (B54) (B64) 100 V, 200 V Yes Relay, PLC 12 V 2-wire 24 V 200 V or less None C73C C80C Yes Connector 24 V or less IC circuit None Diagnostic indication (2-color indication) (B59W) B59W Grommet Yes Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N

Sine Cylinder Series REC ø20, ø25, ø32, ø40 How to Order 25 B C RE 150 M9BW Sine cylinder Number of auto switches Nil 2 pcs. Rod type S 1 pc. n “n” pcs. Mounting style B C Basic style Single clevis style Auto switch L D Axial foot style Double clevis st

Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.

Cylinder with Lock Double Acting, Single Rod Series CNS ø125, ø140, ø160 How to Order CNS L 100 125 D 100 M9BW D L 125 CDNS With auto switch With auto switch Number of auto switches (Built-in magnet) Nil 2 pcs. Mounting style S 1 pc. Basic style B Tubin

A90 A54 A59W 12 V 100 V Relay, PLC No IC circuit 5 V, 12 V 100 V or less 100 V, 200 V PLC Terminal conduit 2-wire 24 V 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

CQ2 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Built-in Magnet Cylinder Model Double acting Action D 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 RQ If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. (Example) CDQSL25-30D 25 For Manufacture of Intermediate Strokes, refer to page 552.

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

** A90** A54 A64 A33C A34C A44C A59W 100 V B54 B64 A33 A34 A44 B59W Grommet IC circuit Yes No 100 V or less Relay, PLC 100 V, 200 V 2-wire PLC 12 V No 200 V or less 24V Terminal conduit Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indicator) *1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee

JIS Standard Hydraulic Cylinder Double Acting/Single Rod

A90 100 V 100 V or less 100 V, 200 V 200 V or less 5 V 3-wire (NPN equiv.)

CHA

Yes 100 V 100 V or less 100 V, 200 V 200 V or less Grommet Relay PLC No Yes No IC circuit B54 B64 A33 A34 A44 B59W 12 V 24 V 2-wire Terminal conduit PLC Yes Relay PLC 100 V, 200 V DIN terminal Grommet A59W Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

MY1B

Also, when exceeding the air cushion stroke ranges on page 960, the piston speed should be 100 to 200 mm per second. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range.

Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM

A90 B54 B64 C73C C80C B59W 100 V Reed switch Grommet 100 V or less IC circuit 100 V, 200 V 12 V Relay, PLC 200 V or less 2-wire 24 V Connector 24 V or less Grommet Diagnostic indication (2-color indication) Solid state switches marked with are produced upon receipt of order.

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16), 075(3/4), 106(1 1/16), 150(1 1/2), 200(2), 250(2 1/2), 300(3), 400(4) Series NCQ8 How to Order Without auto switch B 056 025 NCQ8 B 056 025 Z M9BW S NCDQ8 With auto switch Built-in magnet X-Option Nil XB6 XC4 Standard High temp.

CH

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked are produced upon receipt of order.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 21 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

Mechanically Jointed Rodless Cylinder Basic Type ø 25, ø 32, ø 40 MY1B Series

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.