High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Compact Cylinder with Lock Series CLQ

BBA2: For D-A7/A8/F7/J7 Stroke range (mm) Bore size (mm) Stroke range 1 to 50 20, 25 32, 40, 50, 63, 80, 100 1 to 100 Part number: CLQB40-47D-B A 3 mm spacer is installed in standard cylinder CLQB40-50D-B. The B dimension is 79.5mm. The above stainless steel screw kit is used for water resistant auto switch type D-F7BAL when it is shipped mounted on a cylinder.

VZS

Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations.

IZx-OMT0049

to 1100 50 to 2000 50 to 2000 effect before installing. 3-1-5.

Rotary Actuator/Vane Style Series CRB1

n ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 Key 1 e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws L Screw Model CRB1BW 50 CRB1BW 63 CRB1BW 80 CRB1BW100 M 6 48 M 8 52 M 8 60 M10 80 118 Series CRB1 Rotary

CL

B1 BX BY C D BP J K KA Without rod boot Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 Up to 1000 Up to 1000 Up to 1200 With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 30 35 35 40 40 50 50 56 59 67 73 77 85 112.5 121 133 44 52 64 78 92 115 128 144 40 50 55 65 80 90 90 90 27 32 32

JXCx-OMU0004

1800 17500 15 1000 20 2000 20 62 No.JXC-OMU0004-A 11. 11.1 [5m ] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 S B B-6 9 B A-6 8 3 14.2 2 1 8 14) B1 A1 17.7 6 5 2 1 18 B6 A6 16 15 L 11 30.7 11.2 [820m] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

50 152 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 50 45 150 22 21 25 11 90 170 56 120 152 37 115 194 103 50 55 182 M10 x 1.5 depth 20 M14 x 2 depth 25 17 depth 12 Long Stroke Bracket Mounting Stroke Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V P U Y T R S O R Q 20 20 20 250 to 400 157 80 30 40 48 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/

Modular F.R.L. Unit

66 74 74 K 12 14 14 18 18 L 5.5 7 7 9 9 M 3.2 4 4 4 4.6 N B 132 184 187 222 224 J 33 L 5.5 7 7 9 9 F 43 57 57 75 80 G 30 41 41 50 50 H 24 35 35 40 40 E 41.5 55 55 72.5 77.5 AC20C AC25C AC30C AC40C 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 2 Note 1) 50 71 71 88 88 45 50 50 75 75 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20 only, the position

Air Slide Table

Retraction stroke end E E1 H H G B F (C) A E E1 H H G B MXQR-BT8 MXQR-JT8 A F Stroke adjustment range (mm) A B C F G H J K 1) E E1 Applicable size Model MXQR 6 M2.5 x 9 M6 x 0.75 1 4 8 6 28.5 8.5 19 18 12 MXQR-BT6 1.4 MXQR-BT8 MXQR 8 M3 x 11 M8 x 1 5 12 40.8 8 10 24.5 24 20 7 MXQR-JT8 1.4 6 MXQR-BT12 MXQR12 M4 x 14 M8 x 1 12 40.8 10 14 29 28 18 7 5 MXQR-JT12 1.4 7 46.7 MXQR-BT16 MXQR16 M5

Large Size Vacuum Module: Series ZR

Example) ZR1--CN(-Q) . 1 pc. ZS-10-5A-50 . 1 pc.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Modular F.R.L. Units

8 1/8 1/8 1/8 1/8 M 30 30 41 50 50 T 55 55 65 70 70 P1 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 AR20-A AR25-A AR30-A AR40-A AR40-06-A 37.5 37.5 37.5 42.5 42.5 67.4 70.4 83.5 100 101.5 Note) The total length of B dimension is the length when the filter regulator knob is unlocked. 50 Modular Type Lubricators Series AL AC AFARAL AWAL AFAR AFAFMAR AWAFM AF AFM / AFD AR AL AW Attachment Lubricator

Programless controller Step motor (servo 24 VDC)

Brown 2 A B-1 Cable length (L) Red 1 A A-1 Orange 6 B B-2 Yellow 5 B A-2 8 8m *1) Green 3 COM-A / COM B-3 A 10m *1) Blue 4 COM-B / A-3 B 15m *1) Shield Cable color Terminal no. C 20m *1) Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 *1) Produced upon receipt of A A-5 Black 6 order. B B-6 Orange 9 Only Robotic type cable can be selected.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for

A

Model A B C D E F G H J NAR425 80 141 37 67 71 (72) 3 50 48 80 B24 NAR625 98 152 40 78 76.5 (77.5) 7 87 52 90 B25 NAR825 126 217 75 110 92.5 (93.5) 5 NAR925 160 242 89 140 107.5 (108.5) 10 H O W T O O R D E R P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R 25 (N)AR Japanese N North American O P T I O N S B O D Y S I Z E B Bracket G Gauge 4 1/2 6 1 8 1 1/2 9 2 P O R T S I Z E 25

Auto Switch Guide

RE A B REC Locking ring CX How to connect Sleeve CY Connector AC: Connect to terminal no. 1 and no. 2 DC: Connect (+) to no. 1 terminal and () to no. 2 terminal.

Series IDG

Applicable models 0.7MPa (101.5psi) Inlet air pressure IDG3, 5 BM59 25C (77F) 25C (77F) 25C (77F) Inlet air temperature Inlet air saturation temperature Ambient temperature IDG10 BM61 1l/min (ANR) {inlet air pressure at 0.7MPa} IDG20 BM63 Dew point indicator purge air flow rate Port size (nominal size B) Weight kg (with bracket) 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 IDG30, 50 BM64 0.11 0.25