Modular F.R.L. Unit

AD38 AD38NNote 5) AD48 AD48NNote 5) AD48 AD48NNote 5) Float type Note 4) auto drain N.C. AD27 AD37 AD37NNote 5) AD47 AD47NNote 5) AD47 AD47NNote 5) With back flow mechanism Filter regulator Note 1) Assembly includes a bracket and set nuts. Note 2) in part numbers for a round pressure gauge indicates a type of connection thread.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5 19.5 G 3/8 Electrical entry 39.1 5 x 1/4" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 43.8 53.6 < >: AC Note) When using this valve for IP65, mount a seal connector to the electrical entry. 560 VQ1000/2000 1021Semi-standard Different Number of Connector Pins F and P kits with the following number of pins are available besides

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5 19.5 G 3/8 Electrical entry 39.1 5 x 1/4" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 43.8 53.6 < >: AC Note) When using this valve for IP65, mount a seal connector to the electrical entry. 560 VQ1000/2000 1021Semi-standard Different Number of Connector Pins F and P kits with the following number of pins are available besides

F

26 14.5 2.3 6.3 1/8 10-32UNF KJH01-32 7 18.5 15.5 2.3 2.1 1/8 1/16 KJW01-33S 9.5 7.8 17 25 25 14.5 2.5 8.6 1/8 1/16 KJH01-33S 9.5 21.5 17.5 2.5 5.3 1/8 1/8 KJW01-34S 11.11 7.8 17 25 25 14.5 2.5 10.5 1/8 1/8 KJH01-34S 11.11 16.5 12.5 2.5 5 5/32 10-32UNF KJW03-32 7 8.9 17.5 25.5 27 14.5 2.3 6.4 5/32 10-32UNF KJH03-32 8 18.5 15.5 2.3 2.4 5/32 1/16 KJW03-33S 9.5 8.9 17.5 25.5 26 14.5 2.5 8.7

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

[38.5] Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 18.5 Approx. 300 (Lead wire length) 42.6 [49.6] 2 x 3.2 (For mounting) 2 x 3.2 2 x 3.2 2 x 3.2 (For mounting) (For mounting) 127.2 [131.6] 107.6 [112] (For mounting) 125.4 145.4 147.2 110.6 97.6 65.6 35 35 35 35 21 21 25 21 25 21 Pg7 28 25 28 25 Applicable cable O.D. 3.5 to 7 28 28 Refer to page 375 for dimensions with connector cable. 347 5

HRX-OM-X037

HRL Series 5.4 Description of the Screen 5-55 HRX-OM-X037 Chapter 5 Display and Setting of Various Functions (1) (2) (3) (4) (5) (6) Serial communication setting Table 5.4-25 Setting of serial communication No.

CXS

(2) V = 400 mm/s Graph (1) V = 200 mm/s 20 50 CXSM CXSL CXSM CXSL 10 10 Weight m (kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (

CXS

= 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (5) V = 1000 mm/s 3 CXSM CXSL 32 2 Weight m (kg) 25 1 20 0.6 5 10 20 30 40 50 100 Overhang l (mm) 8-28-16 16 Model Selection Series CXS Horizontal Mounting Graph (6) V = Up to 800 mm/s; Up to

Compact

High speed transfer Workpiece direct mounting Long stroke Light load transfer Combining with external guide Long stroke LEC S LEC SS-T Size Work load [kg] Size Work load [kg] Size Work load [kg] Size Work load [kg] 25 25 25 25 6 10 10 10 LEC Y 32 32 32 32 11 20 20 20 Motorless LAT LZ Size Size Size Size 25 32 25 32 25 32 25 32 LC3F2 Stroke [mm] Stroke [mm] Stroke [mm] Stroke [mm] 2000

High Vacuum Angle Valve, XL Series

Electrical entry G Grommet C Conduit T Terminal D DIN terminal XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve Bellows pressure balance, 2 stage voltage switching type Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 100VAC 200VAC Control power supply 5 24VDC P With control power Warning (1) In case there is no control

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Component parts Cable length 1.5 m 3 m 5 m 8 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 Plug MIL standard Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Applicable base VV5Z3-45F For details, refer to page 3-3-8.

C95

27 32 36 41 5 5 5 5 5 5 12 15 15 20 20 25 5.5 5.5 6.5 6.5 10 10 30 35 40 45 45 55 10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2 B3 L3 L1 TG1 T d1 FL d2 d3 CN XD 45 55 65 75 95 115 14 16 21 21 25 25 5 5 5 5 5 5 11.5 12 14 14

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Grommet (G), (H): 10-SY9 40(R)03 04 3 4 5 G H 3/8, 1/2 [4(A), 2(B) port] 29 30 17.5 (Light/surge voltage suppressor) 2 x 5.4 (For mounting) 60 86.5 5 25 27 Manual override 4 A 2 B PE 57 47 + + A B X EB 3 P 1 EA 5 27 25 96.2 23.7 1/8 (Pilot EXH port) 45.9 [48.1] 164.3 [168.7] G: Approx. 300 H: Approx. 600 1/8 (External

Mechanically Jointed Rodless Cylinder Series MY2

1 $1 #0 r $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

27 2 x 5.4 (For mounting) 5 47 B 2 A 4 PE 57 SMC A B B A Manual override X A side: Orange B side: Green 5 EA 1 P 3 EB 96.5 11.8 27 25 (Light/surge voltage suppressor) 1/8 (External pilot port) (L = 300 to 5000) 153.8 148.2 M12 waterproof connector 71.5 34.5 17.5 25 25 15.5 29.5 29.5 3/8, 1/2 (Piping port) 44.5 3 position closed center / exhaust center / pressure center [M12 waterproof connector

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

8 @5 @3 w !6 !5 !1 !2 !0 !3 !4 @6 !7 @3 20, 25 With coil scraper Component Parts No. No.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25