CJ5-S 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38
6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38
1 12.5 8.5 M8 x 1.25 1 12.5 22 R7 R28 22 1 20 22 8.5 R7 22 20 NAAMS code K NAAMS code K Part no.
wire and case) 10 to 60C Ambient temperature Enclosure IEC60529 standard IP67 Lead Wire Lead wire length indication (Example) D-M9BW L Lead wire length Nil M L Z 0.5 m 1 m 3 m 5 m Note 1) 1 m (M): Available D-M9(V) only The D-M9M and M9VM (lead wire length: 1 m) will be available with products delivered from August 2008 onwards.
Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.
2 3 4 5 Standard T dimension Port size (Nominal size) T dimension 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 215 215 215 265 265 265 325 325 130 130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10
R 5.5 7 7 9 9 S 12 14 14 18 18 U 3.5 4 4 5 5 V 29 41 41 48 48 AC20C-A AC25C-A AC30C-A AC40C-A AC40C-06-A 126.4 167.4 167.4 220.4 235.4 87.6 115.1 115.1 147.1 149.1 23.5 23.5 27 33.5 33.5 30 30 38.4 38.4 41.6 55.1 55.1 72.6 77.6 40 50 50 75 75 23.4 30.5 30.5 36.1 39.6 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 1/8 1/8 1/8 1/8 1/8 Model Semi-standard specifications Optional specifications
46 60 68 22 55 18 8 42 57 5.5 48 96 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 Rc 3/4 NPT 3/4 LVA5m 58 75 84 26 68 27.5 8 56 71 6.5 62 129 Rc 1 NPT 1 LVA6m 58 75 84 32 77 27.5 8 56 71 6.5 71 117 138 476 Series LVA Manifolds Manifold Specifications LLA5A Model LLA2A LLA3A LLA4A Manifold type Stacking type LVC P (IN), A (OUT) type Common IN/Individual OUT Valve stations 2 to 5 stations LVA 3/4 1/4 3/
8 NPT 1/8 Rc 1/8 NPT 1/8 58 75 129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 17-5-11 9 Series LVC Dimensions With flow rate adjustment With by-pass (Max.
16.5 25.5 90 87 115 10 11 M6 x 1.0 M14 x 1.5 Rc 1/8 7 40 70 100 42 73 16.5 25.5 0.5 1 90 97 115 12 11.5 M8 x 1.25 M20 x 1.5 Rc 1/8 8.7 40 75 122 50 91 18.5 28.5 0.5 1 110 119 138 12 10.5 M8 x 1.25 M20 x 1.5 Rc 1/4 8.7 65 105 145 64 99 20.5 35.5 1 1 120 142 155 PA dimensions are for split from center.
38.5 42.5 42.5 V 30 31 35.5 37 U 2.3 2.3 2.3 2.3 T 55 53 70 70 S 15.4 8 10.5 10.5 Q 5.4 6.5 8.5 8.5 P 44 46 54 56 N 34 40 54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 66 76 76 E 40 57 73 73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 40 55 80 80 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting With drain
560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175 73 445 318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking GC ID IE IF IG IH J JA 139.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 51.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 43 7 15 54.2 45.5 38 45 19 23 25 30 80 100 167.5 50, 75, 100, 125,
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking GC ID IE IF IG IH J JA 139.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 51.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 43 7 15 54.2 45.5 38 45 19 23 25 30 80 100 167.5 50, 75, 100, 125,
. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!
Maximum load mass (kg) Without adjuster Optional adjuster Model Shock absorber Internal rubber cushion Rubber stopper With bumper Metal stopper RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 Use 2 position 4/5 port solenoid valve. Use Recommended Air Pressure Circuit.
mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% Precautions LECS; 15000 15000 Duty ratio: 75% 10 10 Duty ratio: 75% 5000 5000 0 0 0 10 2.5 5 7.5 0 5 4 1 2 3 Work load [kg] Work load [kg] The products can be used up to 100% duty ratio.
19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146 200 191 M8 x 1.25 20 30 5 8 33.5 5 6 25 M26 x 1.5 1/8 146 204 195 M10 x 1.25 20 34.5 6 8 37.5 5.5 8 32 M26 x 1.5 1/8 159 217 208 M10 x 1.25 22 42.5 6 8 46.5 5.5 10 40 M32 x