VQ5000 Kit designation CU1 Note 1) C Stations Kit (connector) CU2 Note 1) 02 2 stations Direct exhaust with silencer box: D and U side exhausts Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust P65 enclosure SB SD Note 1) 12 12 stations SU Note 1) W U D U D Note) Combination of [C ] and [S ] is not possible.
Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.
Min. load impedance: 50 Max. applied voltage: 28 V, Max. load current: 80 mA, Internal voltage drop: 1 V or less C: Analog output: 1 to 5 V Output impedance: 1 k D: Analog output: 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 PNP (1 output) + External input type PFMC7--HNPN (1 output) + External input type PFMC7--GBrown DC (+) Brown DC (+) Load U Black OUT1 Black OUT1 Main
Booster regulator IN port C ARX EXH: C EXH: C Spare port Rc1/2 (A) AMR D D (A) (B) (B) OUT OUT 305 Tank OUT port Rc1/2 ARM 216 216 180 4 x 13 4 x 13 50 50 ARP Drain valve 100 100 Drain port Rc1/4 IR-A 200 200 400 700 678 IR Booster regulator model A B C D VBA20A 481 394 Rc3/8 VBA40A 520 429.8 Rc1/2 VBA22A 444 394 Rc3/8 469 VBA42A 477 429.8 Rc1/2 493 IRV The length may be longer than the
Temperature characteristics 0 to 50C (With no condensation) Operating temperature range IP65 equivalent Enclosure Connection type Built-in One-touch fittings z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit
mm) Applicable bore size (mm) D C d D C Part No.
H H J I I G Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424 508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15
Combination of [C ] and [S ] is not possible. Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 11 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.
Flow Characteristics Series Flow characteristics C [(dm3/sbar)] b Cv 0.12 0.21 0.74 0.36 0.32 0.35 0.46 0.83 2.9 SYJ3000 SYJ5000 SYJ7000 Cover (stainless steel) Rubber seal 4/5 Port Solenoid Valve Series SYJ3000/5000/7000 Variations Option Manual override Sonic conductance: C [dm3/(s.bar)] Type of actuation Series Voltage Electrical entry With light/surge voltage suppressor SYJ3000 For DC
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Note 2) The seal is for 40 m and 80 m elements. 784 Vacuum Filter AFJ20 to AFJ40 Series Dimensions AFJ20 N T J M D U Bracket (Option) S SP R ZCUK C B V Q IN OUT AMJ AFJ AFJ 2 x P (Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications
Flow Characteristics Type 21P Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-21P SYJ323 1/8 M3 x 0.5 0.9 SS5YJ3-32P-M5 SS5YJ3-32P-C4 Base mounted for internal pilot 0.25 0.25 0.19 0.18 0.060 0.059 0.32 0.3 0.25 0.27 0.077 0.075 M5 x 0.8
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.
Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2
D) In the state of C), adjust shim w so that the arm side block contacts the workpiece. E) Exhaust the air while in the clamped state, and confirm that the clamp arm does not open. 8 CKZT -X2797 -X2798 Relation between shim thickness and clamping force Use this figure as a guide, as there is a tolerance of about 10% in the clamp cylinder body.
Enter together in order, counting from station 1 on the D side.
to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | Symbol $*Or> 4 Port (Mahitold only 5 Port dI/Nlh J!'
to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | Symbol $*Or> 4 Port (Mahitold only 5 Port dI/Nlh J!'
Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)