Air Slide Table Series MXJ

100 300 400 500 600 700 0.4 MXJ8 0.3 0.5 0.35 Rubber stopper 0.4 0.30 0.2 Load mass W kg Metal stopper 0.25 0.3 0.20 0.15 0.2 100 50 200 300 0.1 100 50 200 300 400 500 Average speed Va mm/s 0.10 500 700 Average speed Va mm/s Collision speed V mm/s 0.05 400 600 0.00 200 100 300 400 500 600 0 Collision speed V mm/s (Average speed x 1.4) 700 Table (2) Max.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

V V Reed auto switch No 100 V or less A90 V V IC circuit Yes 100 V, 200 V A54 B54 V V V Grommet Relay, PLC No 200 V or less A64 B64 V V Terminal conduit Yes 2-wire 24 V 12 V A33C A33 PLC 100 V, 200 V A34C A34 DIN terminal A44C A44 Relay, PLC Diagnostic indication (2-color indication) Grommet A59W B59W V V ** Water resistant type auto switches can be mounted on the above models

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 63 17 46 25 350 531 50 7 46 13 350 345 32 7 21 5 200 166 40 6 21 7 200 198 25 7 10 3 100 153 12 13 16 32 20 6 10 2 100

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

Air Cylinder Series CS2 ø125, ø140, ø160

A90 A54 A64 A59W A33 A34 A44 IC circuit 100 V 12 V 5 V, 12 V Grommet No Relay, PLC 100 V or less Yes 100 V, 200 V No 200 V or less 2-wire 24 V PLC Terminal conduit 12 V Relay, PLC Yes 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

MVGQ

light only) With energy saving circuit MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 100 V 0.78 (With indicator light: 0.81) M L 20, 30, 40, 50, 75, 100 125, 150, 175, 200 110 V [115 V] 0.86 (With indicator light: 0.89) [0.94 (With indicator light: 0.97)] MVGQ 20 Apparent power (2) CV AC (VA) Intermediate stroke (mm) 200 V 1.18 (With indicator light: 1.22) MVGQ As for the intermediate strokes (by

Slit Valve XGT Series

For 200 mm wafer For 300 mm wafer 529

Magnet: D (Built-in), Mounting: T (Center Trunnion), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: Rc, Stroke: 1000mm

Magnet: D (Built-in), Mounting: T (Center Trunnion), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: Rc, Stroke: 400mm

Magnet: D (Built-in), Mounting: T (Center Trunnion), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: Rc, Stroke: 300mm

Magnet: D (Built-in), Mounting: T (Center Trunnion), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: Rc, Stroke: 400mm, Option: J (Nylon Tarpaulin Rod Boot & Cushion at Both Ends)

Magnet: D (Built-in), Mounting: T (Center Trunnion), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: Rc, Stroke: 150mm

Magnet: D (Built-in), Mounting: T (Center Trunnion), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: Rc, Stroke: 250mm

Magnet: D (Built-in), Mounting: T (Center Trunnion), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: Rc, Stroke: 800mm

Cylinder (Tube) Inner Diameter(φ): 125, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): 0～70, End Locking: [Included] Presence, Valves: No, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 125, Stroke(mm): 275, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): 0～70, End Locking: [Included] Presence, Valves: No, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 125, Stroke(mm): 400, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): 0～70, End Locking: [Included] Presence, Valves: No, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 125, Stroke(mm): 800, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): 0～70, End Locking: [Included] Presence, Valves: No, Operating Pressure