For 4 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Positioning/ Pushing Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 INC 500 250.00 1000 1000 1 0 0 20.0
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
[FSC] 1 [F 6] -38No.PS-OMM0006CN-E [F11] <> [F11] [F11] 1000 100 , [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg]) 27[F 0] -39No.PS-OMM0006CN-E [F80] 30 <> [F80] 1 2 [F80] 1 OFF 1 2 30 () 2(ON) ON OFF -40No.PS-OMM0006CN-E [F81] <> [F81] [F81] 000 50 -41No.PS-OMM0006CN-E [F90] <> [F90] [on]() 1 [oFF] () [oFF]() 2 [F90] 1 43 -42No.PS-OMM0006CN-E
Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
Magnet: D (Built-in), Mounting: L (Axial Foot), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 1200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewied Connector: MDPC (1.0m Cord Length, M12-4 Pin Connector)
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 1200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: F59W--Solid State, 2-color Indication, 3 Wire NPN, Lead Wire or Prewied Connector: 3m, Number: 1 pc.
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewied Connector: 3m, Number: 1 pc.
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J51--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: F59--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59W--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 25mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewied Connector: 3m, Number: 1 pc.
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 400mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -