Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification

Electric Slide Table / High Precision Type 《 AC servo motor 》

rev) Encoder [LECSC-T]Absolute 18-bit encoder (Resolution: 262144 p/rev) Power Horizontal 45 65 consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131 255 157 308 197 385 Power consumption [W] at 20C *9 6.3 7.9

EX500-GPR1A.eng

Specification Display Item P-ch MOS-FET ( open drain ) EX9-OET1 N-ch MOS-FET ( open drain ) EX9-OET2 Specification P-ch MOS-FET ( open drain ) EX9-OEP1 EX9-OEP2 2. EX9-PE1 1. EX9-OET1/EX9-OET2/EX9-OEP1/EX9-OEP2 Settings for display PWR PWR PWR Turns on: Power is supplied from external power supply.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

L Manual release (non-lock type) : Suffix N G G WL 2-P (Rc, NPT, G) DL Width across flats KA J RF MO DL MM HR E D E HN H1 AL Width across flats B1 2-cushion valve Width across flats of hexagon hole WB A N F K N M H S + Stroke B C ZZ + Stroke Double lock: CBA2B Bore size -WN Stroke Manual release (non-lock type) : Suffix N Manual release (lock type) : Suffix L End lock CBA2 G G WL 2-P (Rc

D. P. Lube (Unit) Series ALD(U)600/900

250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Table of Contents

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

One-touch Fittings

2 3.2 4 6 8 10 12 16 V V V V V V How to Order P.174 Variations P.175 Dimensions P.176 Metric P.173 2 3.2 4 6 8 10 12 16 V V V V V V V How to Order P.186 Variations P.187 Dimensions P.188 Inch P.185 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V V How to Order P.196 Variations P.197 Dimensions P.198 Inch P.195 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V Gasket Seal (Uni Thread) Connection

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

R P R 26.6 22 Approx. 300 (Lead wire length) 48.8[51] L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P = 10.5 Approx. 300 (Lead wire length) 12.5 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8[51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P = 10.5 12.5 4.5 41.5[48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5[48.5] (Pitch) P = 10.5 13.5 M3

5 Port Solenoid Valve

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500 VQC4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

Refrigerated Thermo-chiller

P. 192 Refrigerator P. 192 Relay P. 198 Relief valve P. 195 RS232C P. 198 RS485 P. 198 RTD (Resistance Temperature Detector) P. 196 S Sealing mechanism P. 194 SEMI F47 P. 199 SEMI S2 P. 199 SEMI S8 P. 199 Signal input/output, I/O P. 199 Solenoid valve P. 195 Solid state relay (SSR) P. 198 Specific heat/Specific heat capacity P. 195 Specific resistance P. 195 Specified CFC P. 192 SV P. 196

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

Hydraulic

Bore size (mm) NN P S X Y ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S +

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100