Modular Type Regulator Series AR

Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 5000 10 0 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) 37 Regulator AR10 to 60 Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20L/min (ANR) Pressure Characteristics (Representative values) AR10 AR40 0.3 0.25 Set point 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Positioning distance (mm) 1500 750 100 10 1 10 151.1 76.1 11.1 2.1 0.5 100 16.1 8.6 2.1 1.2 1.1 Speed (mm/s) The value is a guide when SMC's series LCI controller is used and may vary depending on the driver capacity. 250 7.2 4.2 1.6 1.2 1.1 500 4.3 2.8 1.5 1.2 1.1 Values will vary slightly depending on the operating conditions.

Mechanically Jointed Rodless Cylinder Series MY1

100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure

Table of Contents

N Nil Rc 3 1 0 14 to 60 l/min 20 to 1500 l/min 36 to 2600 l/min NPT Specifications Water/Non corrosive liquid Copper alloy Fluid Stainless steel 304 Liquid, which do not corrode stainless steel 304. Max. pressure 1 MPa 1.75 MPa Water resistance Insulation resistance 100 M (500 DC by megameter) 1500 VAC for one min.

Table of Contents

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

VQ5000

1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure

q"s

Flow characteristics sJppy pressL,e 1.0vea Reliel flow chatacteristics suppry pressu 1 0 Mpa Pressure chalacteristics setpressure: 04 [4pa 0.9 0.8 P o.z 3 o.o 3 o.s P 0.4 0.8 G n 7 g 0.6 3 o.s E 0.4 -o 0.3 t o.z 0.1 0.0 500 1000 1500 2000 Flow te (l/min IANR)) I E E .9 .9 6 " " a o.2 0 . 1 o 0.0 500 1000 1500 2000 Flow raie (rmin (aNB)) 0.4 0.6 0.8 1.0 1.2 Supply pressure (MPa) series ITV

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Air cushion, Operating Pressure

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 125mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 200mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 0.5M

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 500mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: H7BA--Solid State, Water Resist., 2 Wire, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 600mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: H7BA--Solid State, Water Resist., 2 Wire, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 300mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 300mm, Rod Boot: w/o Rod Boot, Lock Position: W (Lock on Both Sides), Release of Manual: L (Locking), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 200mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 150mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Air cushion, Operating Pressure

Magnet: Built-in, Mounting: Basic Style, Style: Non-lube Air Cushion, Bore Size: 63mm, Stroke: 300mm, Rod Boot: w/o Rod Boot, Lock Position: Rear Lock, Release of Manual: Non-locking Type, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -, Auto Switch Mounting Bracket: -