Clean Room Rodless Cylinder Series CYP ø15, ø32

CY Graph (1) MG 100 Total operation cycles (10,000) CX 50 D40 30 -X 20 2010 Data 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Inner Cover Holding Screw Tightening Torque [Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101 Stroke adjustment

Shock Absorbers and Rate Controls

6.4 22.2 M5 100 N/A fflf15xl.5 2fs63i Ofl Sorisr60.526.C 95.3 7 6.2 8.60 54.9 12.7 29.5 9.7 flA M8 370 I fl/A lMltb4x?

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

[Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101 Stroke adjustment screw (inner cover) 100 0.01 0.1 1 10 Particle diameter (m) Flat head screwdriver Note 1) This chart indicates the level of cleanliness inside the measurement chamber.

CYV

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner cover holding screw tightening torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counterbore depth TC Inner cover holding screw Note) (mm) A 8 12 B 10.5 16 C 6.4 10.2 E 4 6 ED 9.5 13 EK 4 6 F 12.5 25 G 10 9 H 45 75 HA 23 39 HI 23 39 HL 37.6 63.3 HP 44 73.5 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 L 67 90 LD 5.6 9.2 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 N 4.5 7.5 P 5/16-24 UNF 7/16-20 UNF PA 25 50 PB 60 100 PC 10 12 Q 112 147 QW 48

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

CYP

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: F (Front Flange), Tube Material: Aluminum Tube, Bore Size: 50mm, Port Thread: Rc, Stroke: 250mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: H (Rear Locking), Release Type: L (Locking), Auto Switch: Y7BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: F (Front Flange), Tube Material: Aluminum Tube, Bore Size: 50mm, Port Thread: Rc, Stroke: 175mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: H (Rear Locking), Release Type: L (Locking), Auto Switch: Y7BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: F (Front Flange), Tube Material: Aluminum Tube, Bore Size: 50mm, Port Thread: Rc, Stroke: 400mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: H (Rear Locking), Release Type: L (Locking), Auto Switch: Y7BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: Y7B, Lead

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: Y7B, Lead

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: Y7B, Lead

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: Y7B, Lead

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 570, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Bore Size: 32mm, Port Type: Rc (PT), Stroke: 250mm, Lock Position: Rear Locking, Manual Override: Locking, Auto Switch: Y7BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -