/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Color Part Number   With 1/16" Barbs With 1/8" Barbs .004 Purple F-2815-041-B80 F-2815-041-B85 .005 Lime F-2815-050

LEC-OM02904

(MR Configurator2 TM) 4 7 4 4.4 4.2 4.5.2 JOG 4.5 JOG TM) (MR Confignrator2 4.5 (EM1) TM (MR Confignrator2 JOG 4 8 4 TM) 4.5.1 (MR Configurator2 (SW2-1)SSCNET (1) (A) JOG JOG ON/OFF (MR Confignrator2 TM)JOG [r/min] 200 0 [ms] 1000 050 ON OFF (b) ON/OFF (MR Confignrator2 TM) [pulse] 262144 09 [r/min] 200 0 [ms] 1000 050 (CCW)(CW) (CCW) (CCW)(CCW) (CW) (CW)(CCW) (CW)(CW) [s

LEC-OM069xx

A.050: Combination Error (The DRIVER and servomotor capacities do not correspond.) (1/4) (Servomotor capacity / DRIVER capacity 4) An encoder fault occurred. Replace the servomotor and see if the alarm occurs again. Replace the servomotor (encoder). A DRIVER fault occurred. The DRIVER may be faulty. Replace the DRIVER.

LEC-OM071xx

A.050: Combination Error (The DRIVER and servomotor capacities do not correspond.) (1/4) (Servomotor capacity / DRIVER capacity 4) An encoder fault occurred. Replace the servomotor and see if the alarm occurs again. Replace the servomotor (encoder). A DRIVER fault occurred. The DRIVER may be faulty. Replace the DRIVER.

SI Unit for Vacuum Manifold

mm] 02 2000 [mm] 03 3000 [mm] 05 5000 [mm] 10 10 [mm] Item Specifications Connector M12 Straight RJ45 Cable O.D. 6.4 mm Nominal cross section AWG26 Min. bending radius (Fixed) 26 mm Fig. 9-3 EX9-ACxx0EN-PSRJ -36No.EX-OMY0014-A (4) Cable with communication connector (M12 M12, Straight) Part number: EX9-AC 005 EN-PSPS Cable length (L) 005 500 [mm] 010 1000 [mm] 020 2000 [mm] 030 3000 [mm] 050

SI Unit for Vacuum Manifold

Accessories (1)Cable with communication/power connector on both sides (M12 M12, Straight) Part number : EX9-AC 005-SSPS Cable length (L) 005 500 mm 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm Item Specification Pin No.

PSxx-OMR0005CN

) M50.8 050() 3585%RH 100G X, Y, Z3 IP40(IEC) 40(W)20(D)110(H)(mm) 100g(50g50g) CE(15F.S.)

PSxx-OML0002CN

-2No.PS-OML0002CN-G 1 1.5 3) 3) 1 1 () [] -3No.PS-OML0002CN-G () () () () -4No.PS-OML0002CN-G () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 10 ) JIS B 8392-1 11.1.21.6.2:2003 () -5No.PS-OML0002CN-G * / / ,FG (35N ) () () * () 6 33 () () 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A

PSxx-OME0003CN

-2No.PS-OME0003CN-F / *3) 1 1.5 *3)1 1 -3No.PS-OME0003CN-F () () () () -4No.PS-OME0003CN-F () * JIS B 8392-1 1.1.21.6.2:2003 () -5No.PS-OME0003CN-F * FG (23N ) () () * () 6 33 ( ) () 10 m DC(-)() () -6No.PS-OME0003CN-F * ( ) () CE 050 * 2030 10 1% * -7No.PS-OME0003CN-F (01MPa) (0-101 kPa) (3 m) (0101 kPa) (1 ) (-101101 kPa) ZS-28-C 1 1 ZS-26-F 3 m + ZS-26-J 3 m 15[

7.5

Note AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 1.5 m 3 m 5 m Conductor resistance /km, 20C 65 or less Cable 25 cores x 24AWG Withstand pressure V, 1 min, AC 1000 For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. Insulation resistance Mkm, 20C 5 or less Note) The minimum bending radius for D-sub connector cables is 20 mm.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.