Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Pilot valve symbol 200 AC 12 DC 100 AC 110 AC 220 AC 24 DC K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y q w Nil e Nil Y r t Nil y Nil u Nil i Nil o Nil !0 Combinations q to !

Guide Cylinder Series MGG

M N HR Bracket (Refer to the table below.) 4 x O 2 x P (Rc, NPT, G) Q T B E S W U K L R I AA X AB AP AL A Y + Stroke J V Z + Stroke Non-lock type Lock type 8 x AF AC AD AE Rod end lock Q R Y + Stroke Head end lock Dimensions not marked with an are the same as standard.

2/3 Port Valve

0 e e u u r !1 i r t !1 !0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No. Description Material Note Body Undercover Cover Plate Valve element A Valve element B Piston Return spring Valve seat Rod Parallel pin Pilot solenoid valve When the pilot operated solenoid valve !

MGP

8 r !1 t !9 !2 !6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

90

Note 10) Fixed unit: kPa Note 11) When K, Q, R or S is selected, select K for e Combination of Supply Valve and Release Valve.

7.5

0 y t r q e u q !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2B60 [N.O. valve x 2] SJ2B60 [N.O. valve x 2] SJ2B60K with back pressure check valve !0 y t r w e u w !2 i !

energy saving effect

Applicable model Minimum operating flow rate [L/min] To circulating fluid outlet r t HRSH100-20 w HRSH150-HRSH200-HRSH250-W25 r q HRS-BP005 y HRSH250-AHRSH300-A40 To circulating fluid return port r t u r e Parts List No.

Modular Type Lubricators Series AL

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Dimensions C 40 52 63 A B 29 33 41 SQ D Note) C Model B VQZ1000 VQZ2000 VQZ3000 35 43 52 67 81 93 A VFS Note) Grommet VFR Individual EXH spacer VVQZ1000-R-5-M5 (-Q) (for VQZ1000) VVQZ2000-R-5-01 (-Q) (for VQZ2000) VVQZ3000-R-5-02 (-Q) (for VQZ3000) VQ7 + Rc1/8:VQZ2000 M5:VQZ1000 Rc1/4:VQZ3000 D Exhaust port can be installed individually by mounting an individual exhaust spacer on to the manifold

Rotary Actuator/Vane Style Series CRB2

CDRB2BW10/15-S CDRB2BW20/30-S 6 x Q Circumference divided in 6 equivalents 3 x Q (CDRB2BW10) 6 x Q (CDRB2BW15) Including A port B port A port B port A port B port A port B port (34.5: Connector type) 2 x R 1 (30) 24 2 x R 25.5 Auto switch Auto switch 2 15 20.5 (26.5: Connector type) 1 The length is 24 when any of the following auto switches are used: D-90/90A/S99(V)/T99(V)/S9P(V) The length

24

6 t r q @5 e r r w @1 !9 u !0 !2 @4 63 or more 16 20 32 @0 @3@2 !5 16 to 25 25 stroke Cushion valve section 16 to 25 50 stroke or more 50 or more Component Parts Component Parts No.

Dual Rod Cylinder Series CXSJ/CXS

CXSL6-R CXSM10-R CXSL10-R CXSM15-R CXSL15-R CXSM20-R CXSL20-R CXSM25-R CXSL25-R CXSM32-R CXSL32-R D-X Individual -X 579 Series CXS Construction: Slide Bearing CXSM6 q e r u !

Series VQ Base Mounted Metal Seal/Rubber Seal

SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).

Rotary Clamp Cylinders

1 o t y u w q r !9 @2 @5 @4 !

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Electric Grippers

4 q u w e r t !7 Component Parts No.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

3 q u !0 !2 r y e !5 o !

AZ1000

r e Pressure gauge unit 2) 1) Refer to gauge guide (P.94) for gauge specifications. w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AZ1001S e q FV4 FV4 FV4 w FV4 FV4 FV4 r 2PW 3PW 4PW 2PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

Step Motor Controller

.> q Check that actuator label for model number.

CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead