AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

5.6 22 Per hour [J] 56 220 Lock looseness at servo motor shaft (Note 5) [degrees] 2.5 1.2 Number of lockings [times] 20 Lock life (Note 3) Work per locking [J] 5.6 22 For the suppressed voltage 145 V TND20V-680KB (135[V]) Selection example of surge absorbers to be used (Note 7, 8) For the suppressed voltage 370 V TND10V-221KB (360[V]) Note 1.

Refrigerated Thermo-chiller

Specific heat C: 0.96 x 103 J/(kgK) (at 20C) Refer to page 79 for the typical physical property values by circulating fluid.

Table of Contents

O.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 26.8 15 15 17 1.6 25 27 30 17 17 19 15.5 1.5 33.2 26.5 6 15.2 3 12 6 4 35.2 28.5 5 6 11 17 21 30 35 45 4 5 5.5 6.5 7 8 Connection thread Applicable tubing 14 17 1 4 33.2 26.5 15 16.2 28 8 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 19 17 35.3 28.5 15 19.3 15

RHC

(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1

33

Water 15% Ethylene Glycol Aqueous Solution Physical property value Physical property value Temperature Density r [kg/L] Specific heat C [J/(kgK)] Current unit system Density r [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02 3.91

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 2 Note 2) 40 1/8

Booster Regulator Series VBA1110 to 4200 1

Pressure gauge Lubrication Not required ITV Installation Horizontal AN200-02 AN400-04 AN300-03 AN300-03 AN400-04 Silencer Pressure adjustable mechanism Relieving type IC How to Order Pressure VBA Pressure increase ratio 2.0 MPa 1 Twice 4 times 0 1 VE Pressure setting Handle operated type 1 Port size VBA1110-02 VY1 Body size Port size Rc 1/4 Symbol 02 1/4 1 VBA1-02 G VBA 1 1 02 1 0 GN Series

Mini Free Mount Cylinder

T NTJ-015A NT-015A NT-02 M5 x 0.8 4 8 9.2 12 U T' M6 x 1 5 10 11.5 16 M8 x 1.25 5 13 15 20 (mm) A Bore size (mm) B C D GB J K L MM NN N P Q QA 12 16 20 3.5 17 26.5 6 4 15.5 11 8 M5 x 0.8 M3 x 0.5 effective depth of thread 6 3.5 M3 x 0.5 4.4 through 7.5 depth, depth of counterbore 5.5 3.5 21 29.5 8 4 17 12.5 11.5 M6 x 1 M4 x 0.7 effective depth of thread 8 5.5 M3 x 0.5 4.4 through 7.5 depth

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

Vacuum

I J , J -0.97 50 1.97 -6.67 -0.193 1 0 0.394 1 .333 -0.00193 0.10 0.00394 -0.01333 -0.000193 0.01 0.000394 -0.000133 Vacuum System Specif ication In the vacuum circuit, vacuum pressure and adsorption response time are affected by piping conditions (tubes, fitting joints, pads, etc.) and the characteristics of the workpiece.

I

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)

Title not found

How to Order NCJ2 NCDJ2 '"nn"J ' Nol available on dolble od or Mounting style Auto switch @ * see.atalog N30l for avaibbb a!

155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Body Size: 4 (1/4 Basis), Port Size: 02 [Cylinder Side (R(PT) 1/4) Pilot Port (Rc(PT) 1/8)], Applicable Tube OD: 09 (Ø5/16")

Body Size: 4 (1/4 Basis), Port Size: 02 [Cylinder Side (R(PT) 1/4) Pilot Port (Rc(PT) 1/8)], Applicable Tube OD: Ø6

Body Size: 4 (1/4 Basis), Port Size: 02 [Cylinder Side (R(PT) 1/4) Pilot Port (Rc(PT) 1/8)], Applicable Tube OD: Ø8

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): -, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): -, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: