Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.

Table of Contents

mounting screw M5 x 0.8 x 16 l 1.

CRB2/CRBU2/CRB1

(Example) For M4: L2 = 8mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 Shaft type Shaft type L1 = S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Symbol

ZP

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Vacuum Pad

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Vacuum Pad

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

5-Port Solenoid Valve

Applicable Fittings: KQ2H, KQ2S Series Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY3l30-ll-M5 4A, 2B M5 KQ2H KQ2S 1P, 5EA, 3EB 1/8 KQ2H KQ2S X, PE M5 KQ2H KQ2S SY3000 SS5Y3-50/51/52 (R) Manifold base 1/8 KQ2H KQ2S 4A, 2B M5 KQ2H KQ2S Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY5l30-ll-01 4A, 2B 1/8 KQ2H

Vacuum Pad

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l 6.5 6.5 5 5 7.5 7.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 7-6-45 46 Series CQ2 Construction Spring extend Spring return Port size For M5 x 0.8 With boss in head side Rod end male thread Built-in One-touch fittings Component

Air Cylinder

-RN 14.5 M10 x 1 Cover side (Head side) Piping port 2 x M5 x 0.8 5 6 M5 x 0.8 20 20.3 18.3 0 0.3 19 20 2.3 2 x 5.5 Mounting hole 18.3 0 0.3 9.5 15 8 21 33 55.5 + Stroke 28 42 Cover outside diameter 83.5 + Stroke With head end lock: ClBJ2F16-HN 6 2 x M10 x 1 Cover side (Rod side) Piping port 2 x M5 x 0.8 8 5 20 M5 x 0.8 19.8 18.3 0 0.3 20 19 2 x 5.5 Mounting hole 12.5 2.3 18.3 0 0.3 8 12.5

NCQ2/CQ2

CQ-M3 x 35L x 40L CQ-M3 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 45L x 50L CQ-M6 x 55L x 60L Cylinder model Mounting bolt part no.

CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

Base Mounted Metal Seal/Rubber Seal Series VQ

M5 fittings for M5 thread are attached without being incorporated.

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l 6.5 6.5 5 5 7.5 7.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 7-6-45 46 Series CQ2 Construction Spring extend Spring return Port size For M5 x 0.8 With boss in head side Rod end male thread Built-in One-touch fittings Courtesy

Metal Seal/Rubber Seal Series VQ Body Ported

(M5 thread) C6 (6) kit VQ5 VQZ N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4")

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel