CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) N.O. (A contact) Number of auto switches N.O. (A contact) N.O. (A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

51

A clevis pin and a knuckle pin are common for the bore size 80 and 100.

PSxx-OML0002CN

C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L 2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m

CJ5-S

MM L RR1 RR1 E1 E1 A L1 U1 A1 NX A1 L1 U1 NZ NX A Part no. Applicable bore size (mm) E1 Part no. Applicable bore size (mm) E1 Applicable pin no.

CJ5-S

MM L RR1 RR1 E1 E1 A L1 U1 A1 NX A1 L1 U1 NZ NX A Part no. Applicable bore size (mm) E1 Part no. Applicable bore size (mm) E1 Applicable pin no.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

92 89 56 70 FF 38 24.5 F 6H9( ) depth 6 +0.030 0 31 6 x M6 x 1 thread depth 10 N 1 x F 2 +0.030 0 6H9 ( ) depth 6 55.5 2 x M8 x 1.25 thread depth 15 40.5 M 0.5 58.5 62 Z ZZ G H (NN 1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

CRB2/CRBU2/CRB1

(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n i t a r t Body (B) End of rotation a o n R g e (mm) Size Rotation range (mm) 50 Size Q M N Body (A) 63 50 Rc 1/8 21 18 (90) 45 , 90 , 135 +8 0 +8 0 +6 0 Q N 80 63 Rc 1/8 27 25 A port B port 100 80 Rc 1/4 29 30 Key position (Start of rotation) 100 Rc 1/4 38 38 M Start

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start

Table of Contents

(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Note 3) When a load is applied directly to the body, the loaded weight should be no greater than the allowable load weights on page 8-15-38.

VQZ1000/2000/3000

Note 2) Weight without sub-plate 2-7-37 Base Mounted 38 38 Series VQZ1000/2000/3000 Construction: VQZ1000/2000/3000 Metal seal type Rubber seal type r e w q r e w q 2 position single 2 position single (A) 4 (B) 2 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 5 (R1) 1 (P) 3 (R2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

KR

(mm) Model N L A N-applicable tubing O.D.

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Modular type lubricator , Improved operability , Increased capacity by reducing the thickness of resin case , Body sizes available: 10 ~ 60 , Thread

CG5-S

Cushion ring Brass Replacement parts: Water resistant scraper (Part No.8) Note) Note) The scraper is held into the Rod cover with a light press fit. The scraper can be carefully pried out, and replaced with a press fit using a manual arbor press.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

port) (External pilot style) 2.5 1 57.1(GZ, GS: 57.8) [58.8] 55.5 [62] 43.1 36.5 25.5 10.5 P R 17 6.5 21.5 36.2 A A A A X X 20.5 38 2-5.5 (Mounting holes) (Lead wire length) 4-Rc (PT)1/8 (P/R port) G: 300 H: 600 (Pitch) 15.5 Manual override L3 P=16 7.5 4.5 Depress and turn to operate and lock override.