DM

(Option ) Multi-connector Socket side only Plug side only DMK6-23 DMK6S-23 DMK6P-23 6 DMK-C-6 DMK6-04 DMK6S-04 DMK6P-04 DMK12-23 DMK12S-23 DMK12P-23 12 DMK-C-12 DMK12-04 DMK12S-04 DMK12P-04 Specifications Applicable tubing materials Nylon, Soft nylon, Polyurethane Applicable tubing O.D.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

JXCx-OMT0061CN

B-1 2 L A A-1 1 B (B-2) 6 1 1.5m B (A-2) 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m (3) Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield

Air Cylinder Series CM2

13 13 13 16 Head end lock 23 23 21 21 Head end lock 126 130 130 159 Double end lock 83 83 83 101 Double end lock 24 24 24 24 Double end lock 23 23 21 21 Double end lock 137 141 141 167 CM2 CG1 Axial foot style: CBM2L Bore size A Stroke -H -R -W MB N L MB1 CA2 ZZ + Stroke LS + Stroke CS1 N L CBM2G Bore size Stroke Head side flange style: A -H -R -W Rod side flange style: CBM2F Bore size A

EXxx-OMU0020CN

Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01() 1 Valve 18, 19 diagnostics 01() 2 Valve 20, 21 diagnostics 01() 3 Valve 22, 23 diagnostics 01() 4 Valve 24, 25 diagnostics 01() 5 Valve 26, 27 diagnostics 01() 6 Valve 28, 29 diagnostics 01() 7 Valve 30, 31 diagnostics 01() 36 No.EX-OMU0020CN 5.1.2.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP(For VQZ1000/VQZ2000) VVQZ2000-CP(For VQZ3000) Used to block an unused cylinder port when using a 4 way valve as a 3 way valve. 1.12-23 VQZ1000/2000/3000 Body Ported Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPGll

Direct Solenoid

..p s y. itrdu.r* 6p,{r) res$dtsLdi.O oF .td d 16, (1) indaaiorrigtrtGdrbry.b r 7 a 1 8, (1) d.t 19, (21 dsi 13, l2l (H 121. and O )dol7 {valw tvDe'F1 1 3 2 1 5 AXT333-16 1 5 1 1 1 a E K l9 I oao) 4.aa t122) 3.25 (43) 136) L0a (23) en 1.09 (23) 06j 1.63 0) 136) axl3i,t12-2 2 Hold ddn bolls r'd bd(waBlm I&s2 !

4/5 Port Air Operated Valve Series SYJA3000 1

Note 3) 5 port base mounted without sub-plate: SYJA540 5-2-23 6 Series SYJA5000 Dimesions: Body Ported Dimensions: Base Mounted 2 position single: SYJA5140-01 2 position single: SYJA5120-M5(-F) 41.5 (For mounting) 2-4.3 M5 x 0.8 (Pilot port) 1 Manual override 15 5 11 A B A B 1 M5 x 0.8 (Pilot port) 10 24 A B 19 R P 2-2.6 2-3.5 4 37.5 (For mounting) (For manifold mounting) (Bracket) 47 42

Free Mount Cylinder Series CU

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

Nozzle Type Ionizer

0.3 High flow rate nozzle High flow rate nozzle 0.2 O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.1 0 0 120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW VP4 9 B B B B B S0700 23 SMC SMC SMC SMC 42 VQ 63.5 VQ4 1 2 3 4 5 6 7 n Stations D side U side 1(P), 5(R3), 3(R1) 6 x Rc 1/2 VQ5 Manual override VQC SMC VQZ 150.5 141.00 SQ 115.5 A A A A A A A 91.5 74.00 VFS 58 18 14 B B B B B B B VFR 3 3 3 4(A), 2(B) port 2n x Rc 3/8, 1/2 30 43 62.5 VQ7 EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100B04A) for the unused

VFS

Please connect with corresponding power side. 01 VV5FS2 1 06 01 Nil N Rc NPT NPTF G Symbol T Series VFS2000 Manifold Passage Porting specifications A, B EA, EB P F Symbol Option Port size 1 2 Side Bottom Plug-in type With attachment plug lead wire Common Common Symbol 01 02 A, B P, EA, EB 3 Side Bottom Individual Common 1 8 Rc Rc Rc M Mixed VK 4 Stations 1 4 1 4 5 Side Bottom Common Individual

EXxx-OMO0027

Data / System Diag. 60A0:01 Under lower limit value Diag. 60A0:1D SI unit -69No.EX-OMO0027-A Module Output Data (Device specific object) Table.

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 8m *1 8 Green 3 COM-A/COM B-3 10m *1 A Blue 4 COM-B/ A-3 Shield 15m *1 B Cable color Terminal no. Vcc B-4 Brown 12 *1) produced upon receipt of order. 20m *1 C GND A-4 Black 13 A B-5 Red 7 A A-5 Black 6 B B-6 Orange 9 Only Robotic type cable can be B A-6 Black 8 3 selected.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

HEC-OM-S008

] :01 06 0050 0 A9 [CR][LF] Stop 0050 Control operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Brown 2 A B-1 A A-1 Red 1 Cable lehgth (L) Orange 6 B B-2 8 8m B A-2 Yellow 5 Green 3 COM-A/COM B-3 A 10m COM-B/ A-3 Blue 4 B 15m Shield (3) Cable color Terminal No. C 20m Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 produced upon recipt of A A-5 Black 6 order B B-6 Orange 9 B A-6 Black 8 Only Robotic type cable 3 can be selected.

OMS0020

Note) If a communication error (frame error, overrun error, parity error etc.) occurs, received data will be discarded, as a response cannot be made. Example) Responsedata " :01 EE NG 11 1E" Check Sum Error Code 11h Result (NG) Command ControllerID 01 30 6.

SYJA300

) 2 x 3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P, A, R port) M5 x 0.8 23 1794 3 Port Air Operated Valve Series SYJA500/700 How to Order Port size M5 x 0.8 M5 Symbol Bore size Applicable series SYJA500 SYJA700 01 1/8 Bracket With bracket F Nil Without bracket SYJA 2 5 1 M5 Body