XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Process Pump Series PA3000/5000/PAX1000 Series PB1000

AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (pilot air supply port) 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN 1/2, 3/4 1/4 5 Series PA3000/5000 Process Pump Air Operated Type

Process Pump Series PA3000/5000/PAX1000 Series PB1000

AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump Air Operated Type

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

PA3000/5000/PAX1000

AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump Air Operated Type

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

VCS

VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E C D G VX3 Q SMC SMC C A B VXA 16 L1 L2 L3 VN LVC 1 Stations D side U side 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 LQ H H P = J 2 N-1/4 N-1/8 : Thread type LVN (pitch) TI/ TIL L Dimension (mm) PA n (stations) Model Dimensions

Series VCS

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

3

Nil N Without arm With arm The overall length Q (from the end on the head side to the rod end) is the same as the MK2 series.

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

JXCx-OMU0004

LEHS 3 5mm/s LEHS10 LEHS20 LEHS LEHS 40 32 2.2 1.4 9 7 36 52 3.9 2.5 15.5 12 63 91 [N] 5.5 3.5 22 17 90 130 *LEHS10 30%F.S.LEHS20 25%F.S.LEHS3240 20%F.S.

VDW30/40-XF

Caution One-touch fitting Dimensions VDW30-G--P7 / P7 Quick Fastener VDW40-G--P10 / P10 Quick Fastener 30 36 Approx. 300 21 23 32 18 20 27 Approx. 300 56 48 10 9 P7 1 (IN) port P7 2 (OUT) port 50 21 P10 1 (IN) port P10 2 (OUT) port 56 VDW40-5G--P10--N VDW30-5G--P7--N 16 12 2 x M3 x 0.5 thread depth 4 2 x M3 x 0.5 thread depth 5 Male Quick Fastener Dimensions Quick Fastener Clip Dimensions

Compact Cylinder with Air Cushion Series RQ

N (Example) A80CN Solid state auto switches marked with a "" are produced upon receipt of order.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45

3 Port Solenoid Valve/

To distinguish from the D type DIN connector, N is listed at the end of voltage symbol.

Compact

(Stroke + 220) 4.5 60 102.3 (102) 20 20 27.3 (56) 20 65 28 27 (28) 20 Motor cable length 300 102 0.3 7.5 Note 1) [ ] for when the direction of return to origin has changed. (When the LECP1, LECP6 or LECPMJ is used.) Note 2) Origin for when the LECP2 is used. The movable stroke is Stroke + 6 mm.

CU

[The voltage drop will be n times larger when n auto switches are connected.] Even though an auto switch operates normally, the load may not operate. Current to operate load (off condition) > Leakage current Use a 3-wire switch if this condition cannot be satisfied. Moreover, leakage current flow to the load will be n times larger when n auto switches are connected in parallel. 7.

2/3 Port Valve

N.O. 10.2 10.4 50 VNC0 VNC02 1 4 VNC814-65F VNC811-65F 65 45 65 70 49 1260 880 15.7 P1 P2 VNC914-80F VNC911-80F 80 56 80 100 73 1800 1400 21.2 Air operated Note)The flange should be JIS B 2210 10K (ordinary type) or equivalent.

LFE-OMY0008

94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 M N O P Q R S T U LFE13 48 39 4.6 12 11.5 52 28 2.5 8.5 2 45g LFE14 48 39 4.6 12 11.5 52 28 2.5 8.5 2 45g LFE26 62 53 4.6 9.5 14 56 38 2.5 8.5 2.6 70g LFE38 62 53 4.6 3.5 20 68 43 2.5 8.5 2.6 70g 8mm0.70.8Nm 71 No.LFE*-OMY0008 M12 M12 M12 M12 (LFE (LFE (LFE (LFE-1 1 1 1-A3) A3) A3) A3) ( ( ( ( )3 )3 )3 )3 4( 4(