Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector),

This is a legacy product, and replaced byVBA40A-F04

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector),

This is a legacy product, and replaced byAC40X-F04-6-D-X2344 MODULAR F.R.L.. FRL SPL.

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: S (-89 kPa), SUP: F03 (Screw-in G 3/8), VAC: F04 (Screw-in G 1/2)

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector),

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Refer to front matter 56 for Safety Instructions and pages 468 to 471 for Flow Control Equipment Precautions.

51

A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle

CG5-S

18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 18 18 28 28 I-G08SUS Y-G08SUS 80 80 M22 x 1.5 71 21 38 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 22 22 32 32 I-G10SUS Y-G10SUS 100 100 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 IY-G10SUS Not applicable for -X165US option Not applicable for -X165US option Knuckle joint pin

Slider Type/Ball Bushing Bearing

50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated by the workpiece

Micro Mechanical Valve Series VM1000

T.T. 6 2 x M20 x 1 Lock nut Thickness 6, Width across flats 27 Max. 10 Symbol 2 port 56 (A) 2 23 R port (3 port only) 52 33.5 12 10 1 (P) (108) 3 port (A) 2 22 13 12 10 32 1 (P) 3 (R) 16 * 0.5 MPa supply 2 x 1/4 2 x 5.5 mounting hole 30 25 F .O.F .* 56 N P .T. 3.5 mm O.T. 2 mm T.T. 5.5 mm 40 16 Series VM200 Series VM200 Toggle lever VM220-02-08A VM230-02-08A Panel mounting hole T.T. 6 2

IDG

Example: Assuming that IDG30 is chosen The inlet air flow rate Q1 = 150 + 56 = 206 l/min (ANR) by Step 4 Outlet air flow rate 150 l/min (ANR) Example From table below (Inlet Air Temperature Correction Factor for Outlet Air Flow rate) Correction factor for outlet air flow rate is 0.40 for Type A products group 0.86 for Type B products group Purge air flow rate 56 l/min (ANR) Compressed air

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

Integrated Controller

)[54]4 54[(56)]4 Stroke Setup communication connector (M12) Parallel I/O connector (M12) Opposite end [Origin end]4 Origin end3 [Opposite end]4 58 (4)[2]4 2[(4)]4 38 Power supply connector (M12) 15 27.8 (48) 24 22 38.5 60 6.5 28.6 6 M4 x 0.7 thread depth 8 (F.G. terminal) D x 120 (= E) B + Stroke F 10 3 H9 (+0.025 0 ) depth 3 120 n x 4.5 4 Motor mounting position: Left side parallel Motor