Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

56 56 56 16 (20) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override PA P R2 R1 49 (64) 49 (64) Manual override PA 2-8 mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port

VFR

Bottom ported: VV5FR2-01 Station 2Port size FD1 FU1 C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) For wiring specifications, refer to page 3-5-8. n: Stations Stations L L1 L2 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 3-5-21 22 Series VFR2000 Non

KJ

(inch) Applicable fitting size d (inch) Model L2 A M Min. port size Note) Weight (g) D L1 P Q 2-Applicable tubing 17 18 21 3 16 3 16 KQ2U07-99 KQ2U05-99 20.5 21.5 56 56.5 64.5 46 10.6 12 13.7 11.4 13.2 39.5 39.5 16.5 17 18.5 4.6 11.4 13.2 15.2 3.5 1 4 1 4 5 16 5 16 KQ2U09-99 24.5 15.2 6 Note) D: Max. diameter K M Applicable fitting H D Branch Y: KQ2U MS Applicable tubing O.D.

AC Servo Motor Driver

(Note) Device status Setting 0 1 WNG 0 1 0 ALM Warning occurrence 0 1 WNG 0 1 1 ALM Warning occurrence Note. 0: off 1: on 5 56 5. PARAMETERS Control mode No.

Sine Rodless Cylinder Series REA/REB

Maximum load mass (Wmax) + Static moment (M) n = Load mass (W) Allowable static moment (Mmax) + Dynamic moment (Me) Allowable dynamic moment (Memax) 1 Moment Load Mass Maximum Load Mass (Static moment/Dynamic moment) Allowable Moment W (kg) (Nm) Wmax Model M2 M1 1.5 M3 1.5 M2 26 85 96 M3 28 56 64 M1 28 56 64 Model REAH10 REAH15 REAH20 Model REAH25 REAHT25 REAHT32 REAH10 4 2.5 REAH15 9 16

MXS Series Air Slide Table

KA G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 Z 48.5 53.5 64.5 82.5 100.5 150.5 M 49 54 65 83 101 151 ZZ 56 61 72 90 108 158 MXS8-10 MXS8-20 MXS8-30 MXS8-40 MXS8-50 MXS8-75 82.5 132.5 56 Air Slide Table MXS Series Dimensions MXS 8 With shock absorber (6) MXS8BS, BT, B 8 A 22 23.5 23.5 14.5 14.5

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

150 n x 5.5 60 5 5H9 (+0.030 0 ) depth 56 5H9 (+0.030 0 ) depth 56 6 10 G 25 Motor option: With lock Cable length 250 (146) 65 20 24 15 Lock cable Motor cable *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

•

ZPRI6Il is_ f8 .16 25 33. 50 5 I 6 '7 , ZPRlOO 1 0 1 2 15 24 32.9 49 5 6 6 51 , 50 51 51 50 48 ZPR25 I 48 51 50 48 Appl/cable tube (mm) .P Applicable tube 0 .0 Q ' R .s ,.4 4 20.6 15.6 16.6 ZPR32 ZPR40 56 54 56 54 57 55 56 54 lOA 12.8 ,.6 6 .21.6 ZI!

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

CNS

56 34 CL1 A B Hs 30 (33) 36 Hs MLGC Auto switch ( ): Denotes the values of D-F5LF.

Body Material: 2 [SCS14 (Stainless Steel)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: N (NPT)

Body Material: 2 [SCS14 (Stainless Steel)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: T (NPTF)

Body Material: 2 [SCS14 (Stainless Steel)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: Rc(PT)

Body Material: 2 [SCS14 (Stainless Steel)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: Automatically Operated, Thread: NPT, Option: -

Body Material: 2 [SCS14 (Stainless Steel)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: Automatically Operated, Thread: NPTF, Option: -

Body Material: 2 [SCS14 (Stainless Steel)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: Automatically Operated, Thread: Rc(PT), Option: -

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

CQS

66) Front flange (including bolt) 137 171 56 66 Rear flange (including bolt) 92 127 34 40 Double clevis (including pin, retainer, bolt) ( ): Long stroke model Note 1) Do not add value shown in the table above to long stroke models.

CY1

50 40 30 20 50 40 30 20 Model CY1H10 CY1H15 CY1H20 M2 2.5 16 16 M3 1.5 10 13 Model CY1H25 CY1HT25 CY1HT32 M2 26 85 96 M3 28 56 64 M1 1.5 10 13 M1 28 56 64 28 16 26 CY1H20 CY1H15 13 10 10 Moment Nm Moment Nm 2 3 4 5 22.5 3 4 5 CY1H10 M3 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s Static moment Moment generated

Modular F.R.L. Unit

B B B B O S M5 x 0.8 N.C.: Gray N.O.: Black S O 1/4 V Applicable models AC10B, AC20B Barb fitting Applicable tubing T0604 10 One-touch fitting Width across flats 17 Standard specifications Bracket mounting size Accessory specifications With pressure gauge With auto drain Model Port size B C D A F M K J H G E Q T N P K L B AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B 71 11 50 56