Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN 1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 NA 2 2 2 2 2 4 4 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111

Compact Hydraulic Cylinder

30 52 26 100 40 255 CHQWB Series Accessory (Standard) Rod end nut 30 d D C H B Material: Carbon steel Part no.

MK

7 30 0.062 0 0.1 0.2 MKB40 1 8 65 29.5 35 9 depth 7 M10 x 1.5 94.5 52 5.5 12 8 69 14 16 40 5 Rc / 61 3 6.5 14 24 7 30 0.062 0.1 0.2 0 MKB50 1 4 0.15 0.15 11 depth 8 76.5 34 41 M12 x 1.75 112 64 6.6 15 10.5 86 19 20 50 7 Rc / 73 3.5 7.5 0.15 30 0.15 8 37 17 0.062 0 0.1 0.2 MKB63 1 4 Note 1) Above figure is for D-A73/A80.

RQ

I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod end nut

MHF2

1 4.5 4.5 4.5 4.5 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-F9(V) D-F9W(V) MHF2-8D1 Red ON Green ON MHF2-8D 0.5 0.5 1 MHF2-8D2 MHF2-12D 0.5 0.5 1 MHF2-16D 0.5 0.5 1 MHF2-12D MHF2-20D 0.5 0.5 1 MHF2-12D1 Auto Switch Mounting MHF2-12D2 Insert the auto switch into the switch mounting groove in the air chuck in the direction shown below, and after setting

REC

Example) If P=0.6MPa, a max. stroke =the respective 0.6 stroke in the graph X 0.5 Figure q 49 45 39 30 0.7 Front flange: F Rear flange: G 259 237 211 168 0.3 Foot: L L 199 183 162 129 0.5 W W W F 168 154 136 109 0.7 Load factor h 119 110 97 76 0.3 m 90 83 73 56 0.5 G 74 68 60 46 0.7 1) h=0.7 or less m 2) h=0.5 or less m 3) h=0.9 or less 1) In the case where cylinder is used for static action

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

REC

10 32 52 36 200 20 RZQ 25 40 34.5 M26 x 1.5 Up to 700 1/8 146 9 10 40 60 40 204 20 40 42.5 32 M26 x 1.5 Up to 1000 1/8 159 9 10 40 60 40 217 22 MI W S 40 53 51 M32 x 2 Up to 1000 1/4 181 10 11 53 77 44.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included

Auto Switch Guide

+) Terminal no. 1 20Hexagon socket head cap bolt Data G 1/2 (Applicable cable O.D. 6.8 to 9.6) OUT () Terminal no. 2 Indicator light Most sensitive position Dimensions Applicable bore size (mm) 40 50 63 80 100 Z H H HW C T T Auto switch model D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 6.5 6.5 7.5 9.5 9.5 49.5 50.5 52 53.5 56.5 57 58 60.5

Sine Cylinder Series REC

Description Material Note Qty. 1 Rod cover 1 Aluminum alloy Clear anodized 17 Rod seal A 1 NBR 2 Head cover 1 Aluminum alloy Clear anodized 18 Rod seal B 1 NBR 3 Cylinder tube 1 Aluminum alloy Hard anodized 19 Piston seal 1 NBR 4 Piston 1 Aluminum alloy Chromated 20 Cushion seal 2 NBR 5 Piston rod 1 Stainless steel Hard chrome plated 21 Wear ring 1 Resin 6 Bushing 1 Oil-impregnated sintered

Sine Cylinder Series REC

Description Material Note Qty. 1 Rod cover 1 Aluminum alloy Clear anodized 17 Rod seal A 1 NBR 2 Head cover 1 Aluminum alloy Clear anodized 18 Rod seal B 1 NBR 3 Cylinder tube 1 Aluminum alloy Hard anodized 19 Piston seal 1 NBR 4 Piston 1 Aluminum alloy Chromated 20 Cushion seal 2 NBR 5 Piston rod 1 Stainless steel Hard chrome plated 21 Wear ring 1 Resin 6 Bushing 1 Oil-impregnated sintered

Air Cylinder CLA Series Fine Lock Model

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

Applicable Auto Switch Model

(Tolerance 30%) Dimensions Bore size (mm) Z Auto switch part number H H' HW C T T' D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 40 50 63 80 100 57 58 60.5 64 67 69 77 91 107 121 44 52 64 78 92 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 6.5 6.5 7.5 9.5 9.5 M5 X 0.8 X 16 M5 X 0.8 X 20 M5 X 0.8 X 25 5.3-38 Solid State Switch/Direct Mounting

2/3 Port Valve

port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

High Vacuum Angle Valve

114 110 83 104 H B A G *1 The E dimension applies when the heater option is included.

EXxx-OML0010CN

ON/OFF 17 3. 19 4. 20 -15No.EX-OML0010CN-C 1. & a) 1/ 2 b) (52) c) (8) 1"0" 2EX6000 -16No.EX-OML0010CN-C 2. & / a) (52) b) 28 c) /(16) d) e) (51) f) g) h) OFF ON i) j) (51) k) (SIDXDYDM) ON/OFF ON SI 030 (DXDYDM) 1 -17No.EX-OML0010CN-C a) (52 ) b) (28 c) /(16 ) d) e) (51 ) f) g) h) Offset binarySign & Magnitude2S Complement mA() V() Scaled mA() V() i) j) (51 ) -18No.EX-OML0010CN-C