ZR 1/2 EXH port 3 3 1.5 1 2.5 1.5 1 2.5 7.5 7.5 Pilot valve supply pressure port Common exhaust port 4.5 4.5 Rc 1/8 PV port Air supply pressure port 2-M5 PS port Common pilot supply port 2-Rc 1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 13-3-46 46 Series ZR Large Size Vacuum Module: Vacuum Pump System Circuit
85 10 (12) 18 5.5 6 4 8 5 201 to 350 to 200 201 to 350 20 to 300 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 301 to 400 to 300 301 to 400 20 to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 301 to 450 to 300 301 to 450 20 to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 301 to 800 to 300 301 to 800 (mm) Without rod
85 10 (12) 18 5.5 6 4 8 5 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 Up to 300 301 to 800 20 to 300 301
46.2 22 57.4 38.2 11 KK6P-03MS R 3/8 48 19 76.0 44.7 41.5 1/2 -04MS R 1/2 31 52 22 53.7 44 13 106.2 -06MS R 3/4 55 27 94.4 45.5 Reference dimension for R threads after installation.
n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same
n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same
) Grommet 3 m 2-wire Solid state auto switch CKG1 24 VDC 2-color indicator 5 m 2-wire (34) Relay, PLC Pre-wired connector 0.3 m 2-wire (14) 3 m Grommet 2-wire 5 m 2-color indicator Pre-wired connector 24 VDC 2-wire (14) 0.3 m Reed auto switch DC/AC magnetic field CKP1 3 m 24 VDC 100 VAC 1-color indicator Grommet 2-wire 5 m DNote 1) Refer to page 433 when ordering the auto switch mounting
2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(P) 3.5 (Breathing port) M5 x 0.8 108.5 5-5-19 8 Series VPA300/500/700 Dimensions A B Base mounted: VPA744(A port) Rc 3/8,1/2 16 119.5 112.5 (PA port) Rc 1/
Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.
w AXT632-17-8 (M3 x 52) 2 q AXT632-17-11 (M3 x 87) 3 For manifold The individual EXH cannot be mounted on the top. w AXT632-17-8 (M3 x 52) 2 Valve + Restrictor (Top) (Bottom) + Individual SUP or Individual EXH (Top) (Bottom) Valve + SUP stop valve (Top) + Individual SUP, Individual EXH or Restrictor (Bottom) q AXT632-17-11 (M3 x 87) 3 For manifold w AXT632-17-8 (M3 x 52) 2 q w Valve + Double
8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.
ML2B C J G5-S (Refer to page 10-2-52.) Review of operating conditions > 1 CV Determination of load factor () Load weight (W) Static moment (M) Dynamic moment (Me) = + + Max. load weight (Wmax) Allowable static moment (Mmax) Allowable dynamic moment (Memax) MVGQ 1 CC (Refer to data (B) on page 10-2-52.)
ML2B C J G5-S (Refer to page 10-2-52.) Review of operating conditions > 1 CV Determination of load factor () Load weight (W) Static moment (M) Dynamic moment (Me) = + + Max. load weight (Wmax) Allowable static moment (Mmax) Allowable dynamic moment (Memax) MVGQ 1 CC (Refer to data (B) on page 10-2-52.)
26 mm 3/5 3/5 95 2 2 2 2 2 2 14 12 41.2 65.4 (60) 4 4 4 4 4 4 39 17 13 1 1 24.5 33.5 64.5 27 (36.5) L2 24.5 33.5 2 x 1/2" 1(P) port 60.5 19 2n x 1/8" 4(A), 2(B) port (Size 18 mm) 2n x 1/4", 3/8" 4(A), 2(B) port (Size 26 mm) 1 2 3 4 Station number n D side U side 5 6 L1 8.5 8.5 (45) 56 52 19 27 Size 18 mm pitch ( ) Size 26 mm pitch ( ) 98 21 118 (Single) 152 (Double dual 3-port) 165 (3-position
fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.
D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15
Push button (Flush) VM220-02-33 VM230-02-33 JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T.
3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.
OD ID L D Number of coil winding per tube length Model D I M E N S I O N S P O LY U R E T H A N E C O I L T U B I N G TCU0425B-1 210 18 1 52 1.5 TCU0425B-2 280 4 2.5 2 35 28 TCU0425B-3 265 3 22 1 TCU0604B-1 24 1 54 2 325 TCU0604B-2 2 27 1.5 6 4 37 TCU0604B-3 305 3 17 1 TCU0805B-1 8 5 330 31 1 41 2 Courtesy of Steven Engineering, Inc. !
9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.