AS

54.7 17 20.9 AS3001F-07-3 167 88 18.5 10 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 16 AS4001F-10-3 77.7 64.4 8.2 82.1 11.3 35 69.3 61 21 18.5 AS3001F-09-3 27 21 24.5 3.5 171 95 12 AS4001F-12-3 36 70.3 62 22 3/8" 17.2 33.3 62.1 56.7 21 70.8 9.5 20.9 AS3001F-11-3 Note 1) Reference dimensions 175 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 76.9 10.3 AS4001F-11-3 24.5 188 AS4001F-13-3 21.7 1/2" 83.1 36.3

Electric Actuator

Note 4) The number in brackets indicates when the direction of return to origin has changed. 200 280 6 2 206 300 380 8 3 306 400 480 10 4 406 ( ) 0.025 0 3H9 depth 3 4 x M5 x 0.8 thread depth 8.5 45 64 (102) LEFS25 Body mounting Note 1) reference plane 38 ( ) 0.025 0 3.5 50 3H9 depth 3 (L) Cable length y 250 (52) A (Table traveling distance) Note 2) 2 [4] 10 52 (115.5) (2.4) [Origin] Note

Rotary Actuator/Vane Type

D2 = CB = C X = [mm] Size CRB2, CRBU2 Y L2 max D2 10 2 to 8 Y-1 3 [mm] Size CRB2 CRBU2 X L1 max D1 X L1 max D1 10 4 to 14 X-3 3 2 to 14 X-1 3 15 5 to 18 X-4 3 to 4 3 to 18 X-1.5 3 to 4 20 6 to 20 X-4.5 3 to 5 3 to 20 X-1.5 3 to 5 30 6 to 22 X-5 3 to 6 3 to 22 X-2 3 to 6 15 3 to 9 Y-1.5 3 to 4 20 3 to 10 Y-1.5 3 to 5 30 3 to 13 Y-2 3 to 6 40 6 to 15 Y-4.5 3 to 8 86 Simple Specials CRB2 Series

VZ3000

Refer to pages 3-3-37 to 3-3-52 for manifold use. Combinations of Solenoid Valve and Gasket Round head combination screw M2.5 x 25 (With spring washer) Made to Order Specifications (For details, refer to page 3-3-85.)

NCG/CG1

10 17.5 17.5 20 20 15 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53 63.5 75.5 75.5 95 95 118 123.5 125.5 144 169.5 169.5 202.5 206 22 7 38.5 3.5 15 36 49 25 8 45 3.5 16 44 58 2-TD8 (Pin O.D.)

High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

ZR

1/2 EXH port 3 3 1.5 1 2.5 1.5 1 2.5 7.5 7.5 Pilot valve supply pressure port Common exhaust port 4.5 4.5 Rc 1/8 PV port Air supply pressure port 2-M5 PS port Common pilot supply port 2-Rc 1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 13-3-46 46 Series ZR Large Size Vacuum Module: Vacuum Pump System Circuit

C95

3 to !

C95

3 to !

CNG

[Horizontal] W 3 port Normally open SOL.C SOL.B Regulator with relief function SOL.A 3 port Normally closed 2.

CM2

3 !4 !5 !6 !7 !8 !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Load voltage Auto switch model Lead wire length (m) Indicator light Electrical entry Wiring (Output) Pre-wired connector Applicable load DC Type Special function 0.5 (Nil) 1 (M) 3 (L) 5 (Z) AC M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed auto switch Solid state auto switch IC 5 V, 12 V

CNG

[Horizontal] W 3 port Normally open SOL.C SOL.B Regulator with relief function SOL.A 3 port Normally closed 2.

Cylinder with Lock Series CNG

112 1/8 65.5 26 16 26 11 7 12 8 47 301 to 800 301 to 800 (mm) Bore size (mm) 20 25 32 40 P K KA M MM NA PG PH PL S LC LD LS LH LT LX LZ X Y W XA XB 117 (125) 141 (149) 24 7 5 6 3 M8 x 1.25 1/8 21.5 2 65 4 6 25 3 50 62 15 10 3 12 127 (135) 151 (159) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 128 (136) 154 (162) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28

•

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

LEC-OM071xx

1 3 Wiring and Connection 3.

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

Manifold Specifications

(Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Series VS

30.5 L 58.5 M 22 N 45.5 O 52 P 81 Q 49 R 18 S 5.5 T SIZE 1 SIZE 2 SIZE 3 189.5 125 9 52 52.5 64.5 96.5 112 26 34 26 37 64.5 31.5 58.5 67.5 97.5 58.5 20.5 3 41 52 41 52 92 36 69 82.5 121 74 28 4 234.5 142.5 13 77.5 79.5 92 108 123.5 CC 188.5 199 244 SIZE 3 SIZE 2 57.5 1.5 U V 14 25 43 W X 2 42 Y Z 133 AA BB SIZE 1 1 73 56 35 53 2 20 150.5 4 68.5 71 30 45 2 20 175.5 n= NUMBER OF STATIONS (MIN

MNB

] W SOL.C SOL.B SOL.A W SOL.C SOL.B SOL.A 9-6-3 4 Series MNB Specific Product Precautions 3 Be sure to read before handling.