ZR 1/2 EXH port 3 3 1.5 1 2.5 1.5 1 2.5 7.5 7.5 Pilot valve supply pressure port Common exhaust port 4.5 4.5 Rc 1/8 PV port Air supply pressure port 2-M5 PS port Common pilot supply port 2-Rc 1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 13-3-46 46 Series ZR Large Size Vacuum Module: Vacuum Pump System Circuit
Axial foot style (2) Rod side flange style (1) Head side flange style (1) CJ1 Clevis integrated style (1) (1) Single clevis style CJP (1) (3) Double clevis style Rod side trunnion style (1) (2) CJ2 (2) Head side trunnion style (1) CM2 Boss-cut basic style (1) Boss-cut flange style (1) CG1 Boss-cut trunnion style (1) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San
0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !
6.5 4 0.5 10.5 0 8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 12 12 6 16 6 16 10 10 12.5 12.5 17.5 17.5 6 6 9.5 9.5 9 9 Note) Adjust the auto switch after confirming the operating
8 44.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 Up to 200 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 Up to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 Up to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 Up to 300 301 to 500 Without rod boot With rod boot Bore size
52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 to 300 301 to 500 20 to 300 301 to 500 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 P K KA MM NA PG PH PL S FD FT FX FY FZ XA XB J l 0.25 ZZ 182 H e f h ZZ 202 35 30 16 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 220 198 40 30 17 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 5.5 7 60
2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 KNH-R02-100 KNH-R02-150 KNH-R02-200 D H1 A L1 Low noise nozzle with self-align fitting/KNS (mm) Model Nozzle size D Connection size L1 L2 Width across flats H1 H2 L2 D 0.75 x 4 1 x 4 0.75 x 4 0.9 x 8 1 x 4 8 8 10 10 10 12 12 14 14 14 14 14 17 17 17 24.3 24.3 24 24 24 16 16 17 17 17 KNS-08-075-4 KNS-08-100-4 KNS-10-075-4 KNS-10-090
46 54 19.5 3 25 97 10 32.5 56 13 72 22 17 12 13 38 83 10 Data Up to 800 40 8 101 1/8 9 63 52 27 3 31 104 10 38 65 14 83 30 22 16 13 46 91 14 Up to 1000 50 11 120 9 1/4 65 75 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 135 9 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153 12 1/4 95 102 37 4 45.5 169 16 72 100 19 126
Effective thread length MM H1 V Q Fd E D D FY B MM Width across flats F FT FE T ZZ + 2 strokes VA N FX FZ Ee11 30 35 40 45 45 55 Effective thread length (mm) Width across flats A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 Fd 25 31 38.5 39.5 45.5 54 FD 7 9 9
7 260 245 8 293 278 9 326 311 10 359 344 2 95 80 3 128 113 4 161 146 5 194 179 5-5-23 12 Series VPA300/500/700 Dimensions Common exhaust: VV3PA7-41Station 1-04 NO NC 112 (R port) Rc 1/2 40 (Mounting hole) 2-8.5 24 PA 52 119.5 112.5 48 3(R) 119.5 86 1(P) 52 PA (P port) Rc 1/2 (Pitch) (PA port) Rc 1/8 41 37 8 L2 112.8 L1 (PA port) Rc 1/8 PA Courtesy of Steven Engineering, Inc.-230 Ryan Way
Description Material Qty Note 18 19 20 21 22 23 24 25 26 27 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Clevis bushing Coil scraper Rod seal Piston seal Tube gasket Magnet holder Magnet Switch mounting rod Chromated Hard anodized Chromated 1 1 1 1 1 1 1 2 1 1 1 1 1 1 2 2 4 1 2 2 1 1 1 1 2 Phosphor bronze NBR
1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.
Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1
52 3-position Pressure center Metal seal VQ450 5 0 6.2 0.18 1.6 6.4 0.18 1.6 45 47 47 0.28 (0.34) Rubber seal VQ450 5 1 7.0 0.38 1.9 7.1 0.38 2.0 50 52 52 Double check Metal seal VQ460 5 0 2.7 3.7 55 57 57 0.50 (0.56) Rubber seal VQ460 5 1 2.8 3.9 62 64 64 Note 1) Value for valve on sub-plate and cylinder port 3/8 Note 2) Based on JIS B 8419: 2010.
41.5 42 46.5 47 48 34.5 36.5 34.5 37 35 40 36 41 41.5 43.5 45.5 46 1 8 17.5 2.5 15.5 10 9.6 Applicable tubing 1 4 1 8 5 32 18 3 16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22
OD ID L D Number of coil winding per tube length Model D I M E N S I O N S P O LY U R E T H A N E C O I L T U B I N G TCU0425B-1 210 18 1 52 1.5 TCU0425B-2 280 4 2.5 2 35 28 TCU0425B-3 265 3 22 1 TCU0604B-1 24 1 54 2 325 TCU0604B-2 2 27 1.5 6 4 37 TCU0604B-3 305 3 17 1 TCU0805B-1 8 5 330 31 1 41 2 Courtesy of Steven Engineering, Inc. !
(Size 18 mm) 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 3(R) port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port M4 x 7 earth thread 82 57.5 60 30 35.5 31.3 22 28.5 43 11.3 13.5 19 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 1(P) port 2n x Rc, G (According to ISO1179-1), NPTF 1/8" 4(A), 2(B) port (n-1) x 19 52 3 U side
(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.