Vacuum Pad 2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.
2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.
A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner
(P A/B) 2 position metal seal VQ5 1 2 VQ4 00 4/2 5/3 (A/B EA/EB) VQZ VQD 1 4/2 (P A/B) 2 position rubber seal 1 2 VQ4 01 4/2 5/3 (A/B EA/EB) Note) Port size: Rc 3/8 Manifold Option Refer to pages 2-5-34 to 2-5-38 for detailed dimensions of each option.
2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.
2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(P) 3.5 (Breathing port) M5 x 0.8 108.5 5-5-19 8 Series VPA300/500/700 Dimensions A B Base mounted: VPA744(A port) Rc 3/8,1/2 16 119.5 112.5 (PA port) Rc 1/
85 10 (12) 18 5.5 6 4 8 5 to 200 201 to 350 201 to 350 20 to 300 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 to 300 301 to 400 301 to 400 20 to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 to 300 301 to 450 301 to 450 20 to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 to 300 301 to 800 301 to 800 (mm) Without rod
28.6 12.4 63.8 1.2 55.8 24 AS431F-04-12SD AS431F-N04-11SD 22 36.3 61.7 20.9 12 16.2 49.4 55.3 52 3/8" 17.9 25.8 21 26.8 19.4 32.6 1/2" NPT 1/2 23.8 21.7 29 26.8 63.8 1.2 55.8 12.4 AS431F-N04-13SD 19.4 52 36.3 58 22 Reference dimensions of M5 x 0.8, R threads after installation.
40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.
4, 8, 12, 16 250 10 200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4
-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n-2)/2 n = 2, 4, 6, 8 160 10 10 + 55(n-2)/2 n = 2, 4, 6, 8 A5 A6 2 A59W n 15 15 15 10 10 + 55(n-2)/2 n = 2, 4, 6, 8 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 1 1, 2 F5(W)/J5/J59W n F5BAL/F59F
Note 4) The number in brackets indicates when the direction of return to origin has changed. 200 280 6 2 206 300 380 8 3 306 400 480 10 4 406 ( ) 0.025 0 3H9 depth 3 4 x M5 x 0.8 thread depth 8.5 45 64 (102) LEFS25 Body mounting Note 1) reference plane 38 ( ) 0.025 0 3.5 50 3H9 depth 3 (L) Cable length y 250 (52) A (Table traveling distance) Note 2) 2 [4] 10 52 (115.5) (2.4) [Origin] Note
56.7 49.2 24 49.6 42.1 28.6 AS431FG-04-12 AS431FG-N04-11 12 105 104 22 3/8" 21 36.3 54.4 60.8 32.6 49.4 17.9 52 20.9 26.8 19.4 25.8 16.2 NPT 1/2 56.7 49.2 49.6 42.1 29 23.8 AS431FG-N04-13 106 1/2" 22 57.1 36.3 52 21.7 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads after installation.
2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 40 44 53 61 76 92 104 128 20 25 32 40 50 63 80 100 28 32 38 46 58 70 82 100 Note) ( ): Denotes the dimensions for long stroke.
(Same surface) 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 With 1 pc. 70 75 80 85 90 10 With 2 pcs.
No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55
blanking plate assembly DXT192-13-3A Applicable connector assembly DXT192-52-1-A (For 2 position single) DXT192-52-2-A (For 2 position double, 3 position) Refer to the page 3-10-33 regarding how to order applicable connector assemblies. (1: 100 VAC, 3: 110 VAC, 4: DC).
1/2 EXH port 3 3 1.5 1 2.5 1.5 1 2.5 7.5 7.5 Pilot valve supply pressure port Common exhaust port 4.5 4.5 Rc 1/8 PV port Air supply pressure port 2-M5 PS port Common pilot supply port 2-Rc 1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 13-3-46 46 Series ZR Large Size Vacuum Module: Vacuum Pump System Circuit
85 10 (12) 18 5.5 6 4 8 5 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 Up to 300 301 to 800 20 to 300 301