CC

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AS2000-01/02 AS600-10 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load Load ratio Load ratio Bore size (mm) Bore size (mm) AS4000-02/03/04 AS3000-02/03 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Circuit diagram No load No load Load

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

S070

End Plate Assembly > q U end plate assembly no.

E-P HYREG ® Series VY1 1

2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140

Table of Contents

Special resin Carbon steel Description No. q w e r t y u i o !

New

Conduit P type Q R S Q R S T Q R Q R 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 64.5 67 69.5 69.5 34 45 50 53 52.5 55 57.5 57.5 99.5 102 104.5 104.5 36 47 52 55 68.5 71 73.5 73.5 77 91 96 47.5 50 52.5 52.5 36 47 52 55 23 25.5 28 28 42 53.5 58 61 3 1/2 101.5 23 Series VX2 For Air mm Dimensions/Body Material: Resin Y Y Grommet (with surge voltage suppressor) Grommet W W U U X X U1 U1 X1 X1 z300 Q F D

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

VER2000/4000

6 q w e r t y u i Block packing !

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Speed Controller with One-touch Fittings

2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

2 q o !7 r !3 o r !0 w u t y !2 !3 !1 q i !4 e Meter-in type Meter-in type AS ASP ASN AQ ASV AK ASS ASR ASF Component Parts: Elbow Type Component Parts: Universal Type No. Description Material Note Body A Handle Body B Needle Gasket Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring No.

Thermo-chiller

The indicated value is in (C). e [PRS] lamp Turns ON when the pressure is indicated by q. The indicated value is in (MPa). r [FLOW] lamp Not used in this product t [DI] lamp Turns ON when electric conductivity is indicated by q.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

Cylinder with Lock

Auto switch model Bore size [mm] 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 D-A3/A44 D-G39/K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-A5/A6/A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 D-P3DWA BA10-032S BA10-040S BA10-050S BA10-050S BA10-063S BA10-063S D-P4DW BMB3T-040 BMB3T

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB DBT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 -X BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

MGG

(mm) Q R X Y + Stroke Y Q R X Bore size (mm) 32 86 (94) 25 13 39 40 96 (105) 29 14 46 50 109 (121) 31 15 57 Dimensions inside ( ) are for long strokes.