Body Size: 40, Backflow: w/Backflow Function, Thread: Rc, Port Size: 1/2, Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Upward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa, Made to Order: -

Size: 1/2, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/2, Accessory: None, Option 1: None, Option 2: Flow Direction: Right->Left

Size: 1/2, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/2, Accessory: None, Option 1: None, Option 2: Upward Handle

Size: 1/2, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/2, Accessory: None, Option 1: 0.02~0.2MPa Setting+Non-relieving, Option 2: -

Size: 1/2, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/2, Accessory: None, Option 1: 0.02~0.2MPa Setting, Option 2: -

Body Size: 40, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 04 (1/2), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Slider Type Ball Screw Drive/11-LEFS Series

0 Driver type * Select D for the vacuum port for suction of 50 L/min (ANR) or more. o Cable length Note 3) !

JXCx-OMU0004

RESET B 8.3 P.41 RESET C OFF I/O STOP OFF OFF 8.5 ONP.44 RESET C D RESET C RESET D 66 No.JXC-OMU0004-A (M24V) RESET D RESET D 3.4 P.14 (C24V) RESET D RESET D ( E ) 67 No.JXC-OMU0004-A E ON E BK RLS E EEPROM EEPROM E 10 CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.

ZP

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

CATALOG

D-B53 No/2 Wire D-B64 D-B73 D-C73 D-C73C D-B76 D-C76 D-B80 D-C80 D-C80C Yes/2 Wire Yes/2 Wire 20mA 4~8VDC 50mA 40mA 20mA 24V 48V 110V No/2 Wire ACCESSORIES SWITCH BANDS FOR SWITCHES D-B7, D-B8, D-G7 ACCESSORIES SWITCH BANDS FOR SWITCHES D-B5, D-B6, D-G5, D-K5 ACCESSORIES SWITCH BANDS FOR SWITCHES D-C75, D-C8, D-H7 BM1-01 3/4 BM1-02 1 BM1-32 1 1/4 BM1-04 1 1/2 BM1-05 2 BM1-06 2 1/2 BA-01

ZP

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

Table of Contents

(mm) Effective area (mm2) Nylon Urethane 6.4 13.4 25.6 Note) Weight (g) Model D M2 L Q M1 b D a b KQ2T06-04 KQ2T08-06 KQ2T10-08 6 8 10 4 6 8 10 15 25 4.4 10.6 17.7 12.8 15.2 18.5 16 17 18.5 20 23 26.5 5.3 6 7.5 17 18.5 21 M2 D 12 KQ2T12-10 20.9 28.5 7.5 22 40 28.4 29 10 21 D Note) D: Max. diameter Applicable tubing 8 4.2 M1 Applicable tubing a M1 Cross: KQ2TW Effective area (mm2) Nylon 6.4

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

Table of Contents

Applicable tubing O.D. d Weight (g) D1 39.2 M1 L3 12.9 M2 M1 12.9 L2 14.3 L4 12.9 L1 5.2 D2 39.2 L3 23.5 Weight (g) D1 10.0 L2 13.7 L1 5.2 Model Tubing O.D. d AQ240F-04-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

KJ

(mm) Effective area (mm2) Nylon Urethane 6.4 13.4 25.6 Note) Weight (g) Model D M2 L Q M1 b D a b KQ2T06-04 KQ2T08-06 KQ2T10-08 6 8 10 4 6 8 10 15 25 4.4 10.6 17.7 12.8 15.2 18.5 16 17 18.5 20 23 26.5 5.3 6 7.5 17 18.5 21 M2 D 12 KQ2T12-10 20.9 28.5 7.5 22 40 28.4 29 10 21 D Note) D: Max. diameter Applicable tubing 8 4.2 M1 Applicable tubing a M1 Cross: KQ2TW Effective area (mm2) Nylon 6.4

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

AC

Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02

Table of Contents

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Purchasing order is available in units of 10 pieces. 1 11 VZ1000 VQ7 Refer to L dimensions Fill in with an appropriate no. listed on the table of DIN rail dimensions shown below. d D L A L Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 No.