Tie-rod Type Hydraulic Cylinder 18 25 14 17.5 9.5 M8 x 1.25 18 32 20 M14 x 1.5 30 22 1/4 37 15 106 50 19 50 25 9 73 53 14H9 24 20 28 17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 63 21 55 28 8 80 60 16H9 28 22.4 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 80 26 65 M12 x 1.75 32 8 100 75 18H9 32 28 32 22 20 15 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 90
Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 24 26 27 22 22 24 26 27 22 10 to 16 10
D6 Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D L18 L19 L20 18.2 18.6 22 27.2 28.1 L21 23.2 23.6 27 32.2 33.1 L22 11 12.6 17 22 28 L23 L24 18 19.6 25.8 30.8 36.8 L25 t2 Part no.
If rotational torque are applied unavoidably, refer to page 22.
Symbol Name and function Initial value Unit Setting range Position Speed Torque PD13 *DO1 Output signal device selection 1 (CN1-22) Any output signal can be assigned to the CN1-22 pin. In the initial setting, INP is assigned in the position control mode, and SA is assigned in the speed control mode.
22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) LH LX E E A MA D K G H ZZ MM A MA D K G H ZZ MM 32 32 34 25 22 18 7 14 66 220
CA2 B port Without auto switch With auto switch Bore size (mm) ZZ S ZZ S CS1 Stroke A Stroke B 125 334 197 334 197 140 Series CQS 334 197 334 197 C76 Bore size (mm) Stroke Both of S1, S2 160 363.5 213 363.5 213 B1 A B2 L 180 401 231 393 223 C85 12 42.5 22 (52.5) 3.5 17 (27) (22) 200 411 241 393 223 5 to 30 16 42.5 22 (52.5) 3.5 17 (27) (22) 250 484.5 283 C95 S + Stroke (A + B) 20 50 26
Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30
Description Material Note 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 No.
For high temperature 4 8 10 16 22 Note) Options (2) cannot be combined with each other. Buffer material FFKM Pilot port thread type For ammonium hydroxide High flow spec.
For details, refer to 8.25.2 Positioning Command. 20 21 ACCR MONITOR1 TLIM (torque limit): 22 Set the torque limit with an unsigned value.
24 29 21 25 22 MS 24 22 95.5 91 24 21 32 24 29 25 37 29 19 26.5 24 32 37 30 22.5 19.5 91 85.5 M LQ 26.5 24 112.5 105.5 H 25 30 26 41 49 36 24 22 106.5 100 MQR Inch Size T B side A side Class 7 E1 E2 E2 L L E1 H1 M1 H2 M2 W Model Applicable tubing O.D.
12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.
ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no
system Direct operated Pilot operated diaphragm Pilot operated disk Pilot operated Series VX21/22/23 VXD21/22/23 Single unit Single unit VXP21/22/23 VXR21/22/23 Body Single unit N.C.
23 2.5 4 1.8 1.6 d 5 8 Applicable tube 3 4 2.3 2.6 H1 H2 4 6 3.3 6 5.8 10 M A L 14 6 8 5.3 6.6 14 17 Connection thread 17 25 17 7.5 10 6.8 30 22 27.1 7.6 17 25 17 8 10 7.3 35 22 27.1 26.6 17 9 12 8 45 22 28.7 8.5 17 26.6 17 10 12 9 57 28.7 28 29.9 22 13 16 12 9.3 22 101 22 Reference dimensions after installation of R thread Male Elbow: KFG2L Applicable tube size (mm) O.D.
22 25 17 17 21 21 21 22 22 25 17 21 21 17 22 22 21 25 3.5 3.5 5.4 3.5 5.4 8.5 5.4 9.8 12 15 24 31 42 37 41 79 100/200 100/200 100/200 100/200 100/100 100/100 100/100 50/100 ** Non-Standard Product, consult factory for lead time.
45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 100 114 73 64 45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 MB-B12 125 136 90 78 60 15 110 32 136 13 13.5 24 14 75 267 25+0.084 0 Rotating Angle Model without air cushion is designed to include rubber bumpers.
A L1 L2 H G F M N E B LQ2R4C-M LQ2R4B-M LQ2R4A-M LQ2R3D-M LQ2R3C-M LQ2R3B-M LQ2R3A-M LQ2R2F-M LQ2R2E-M LQ2R2D-M LQ2R2C-M LQ2R2B-M LQ2R2A-M 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 18.5 4 19 18 19.9 12 34.5 22 6 1/4" 16.5 43 23.5 1/4" 42.5 43 5 24 26.2 18 29.5 9 22 23 3/8" 42.5 52 51 52 51 59.5 58.5 59.5 58.5 30 3/8" 6 30 33.1 22 36
18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the Z-phase rst detecting position.