e

X LXS X-axis Y-axis Z-axis 5 Z W 4 kg 5 mm 10 mm 20 mm LC6m 20 LZm Y 10 LC3F2 3 Calculation of Load Factor for Static Load Xm m1: Mass D-m m1 m1 max (from 1 of graph m1) = 15.5 (kg) . E-MY Load factor a1 = m1 / m1 max = 4 / 15.5 = 0.26 X M1: Moment m1 M1 max (from 2 of graph M1) = 1.45 (NNm) .

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

CNA

16 12 12 10 8 to 500 35 32 70 27 108 1/4 1/8 52 12 18 20 40 10 95 17 56.5 20 13 15 12 11 to 600 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 to 600 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 to 750 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 to 750 (mm) Bore (mm) 40 50 63 80 100 K J KA L MM N P Q H S T U V W Z ZZ

Slider Type Ball Screw Drive/11-LEFS Series

8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

20 24 36 44 56 V 18 22 20 28 28 Y 38 47 Z Bore size (mm) 16 20 32 40 50 14 14 19 1 8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.

REA/REB

N N Z + Stroke REAS15 (mm) A B C D d EA EB FA FB G GP H HA HG Model REAS15 7.5 9.5 5 16.6 12 6 13 3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 REAS25 10 11 6.5 26.4 16 8 14 4 7 8.5 70 54 40 20 REAS32 12.5 14 8 33.6 20 8 16 5 7 9.5 86 66 46 24 REAS40 12.5 14 8 41.6 25 10 20 5 10 10.5 104 76 57 25 HP HS HT J x K L LD M MM N NN Model REAS15 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5

REA/REB

/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Refer to the basic type for the female rod end. 732 1011Series CG1R-Z 20, 25, 32, 40, 50, 63 Direct Mount Cylinder How to Order 10 C D G 1 R N 25 100 Z M9BW N Type Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

High Vacuum Angle Valve

D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

/25 CY1H15/20/25 CY1H15/20/25 CY1H15/20 CY1H15/20 CY1H25 CY1H15/20 CY1H25 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 0.03 Deflection (mm) Deflection (mm) 0.04

Air Slide Table Series MXS

G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 GA 11 21 31 43 41 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 ZZ 48 58 68 90 106 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 76 Air Slide Table (Symmetric Type) Series MXSL Dimensions: MXS8L/Symmetric Type Basic style ZZ Z For detailed dimensions on stroke adjusters

CNA

1/4 1/4 64 16 25 49 20 40 10 102 17 67 20 18 12 15 11 Up to 600 +0.3 +0.1 11 M12 x 1.75 22 40 37 102 32 139 1/4 1/4 78 20 31.5 61 25 52 14 123 21 83 20 23 18 17 13 Up to 750 +0.3 +0.1 11 M12 x 1.75 26 40 37 116 41 160 1/4 1/4 92 25 35.5 64 30 52 14 144 21 98 22 25 20 19 16 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) l Z L e f h ZZ MM N P Q S RR T U V W H Z ZZ 40

CNA

20 18 12 15 11 Up to 600 +0.3 +0.1 11 M12 x 1.75 22 31.5 40 37 102 32 139 1/4 1/4 78 20 61 25 52 14 123 21 83 20 23 18 17 13 Up to 750 +0.3 +0.1 11 M12 x 1.75 26 35.5 40 37 116 41 160 1/4 1/4 92 25 64 30 52 14 144 21 98 22 25 20 19 16 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) l Z L e f h ZZ MM N P Q S RR T U V W H Z ZZ 40 50 63 80 100 40 50 63 80 100 30 43 11.2

CV/MVGQ

ZZ S Z ZZ ZZ Z S ZZ Z S ZZ Z S Bore (mm) CC 20 25 32 40 20 25 32 40 20 25 32 40 M20 x 1.5 24 15 19.8 65.3 14 191 182 137 166 157 112 141 132 87 M26 x 1.5 30 15 22 70.5 14 195 186 137 170 161 112 145 136 87 RB M26 x 1.5 34.5 15 25.8 76.5 16 197 164 213 222 188 139 172 163 114 147 138 89 M32 x 2 42.5 21.5 29.8 84.5 16 229 188 243 254 213 268 279 218 163 204 193 138 179 168 113 J D-X 20Data

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators GB GC GA NN MM Mounting nut Relief port M5 x 0.8 Rod end nut NN Cover surface Piping port 2 x M5 x 0.8 C D B 0 0.3 FY FB B 0 0.3 FZ FX 2 x FC Mounting hole Z + Stroke S + Stroke NB H NA F A FT F (mm) C 15 18.3 B 90 91 GC 17 20 FC 5.5 5.5 17.5 19 FB 11 11 FT 2.3 2.3 FX 33 33 FY 20 20 FZ 42 42 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54

7.5

Z is +COM. spec.