Best Pneumatics Vol. 14

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Compact Cylinder with Lock Series CLQ

116.5 53.5 11 11 4 x FD FX FZ L G B + Stroke CLS A + Stroke 100 135 63 11 11 CLQ Bore size (mm) FV FX FZ G L L1 M 63 80 100 RLQ 80 99 117 92 116 136 108 134 154 38 43 50 18 20 22 43.5 53.5 53.5 60 77 94 L1 Rod end nut MLU Head Side flange style: CLQG/CDLQG Head Side Flange Style MLGP (mm) Stroke range Without auto switch With auto switch Bore size (mm) FD FT ML1C A A B B 36 46 43.5 53.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MY1 3.4-11 End Lock Cylinder Series CBA1 40, 50, 63, 80, 100 How to Order L 50 150 H N CBA1 Standard L 50 150 A53 H N CDBA1 With auto switch Number of auto switches Air cylinder with auto switch 2 1 n S n Mounting Basic Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Style Auto switch Lube Non-lube Steel tube N F Without auto switch Refer

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MGC MGF MGZ CY MY 3.8-11 End Lock Cylinder Series CBA1 40, 50, 63, 80, 100 How to Order L 50 150 H N CBA1 Standard L 50 150 A53 H N CDBA1 With auto switch Number of auto switches Air cylinder with auto switch 2 1 n S n Mounting Basic Axial foot Front flange Rear flange Single clevis Double clevis Centre trunnion B L F G C D T Style Auto switch Lube Non-lube Steel tube N F Without auto

Air Slide Table Series MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

asilltr

NOTE 1) Female thread length ("1") is shorter tor the lollowing . 106 (r 1/15') r/s & t/a st. 1/s &l/a st. 150 (1Vr') J/s & 1/a st. 1/s & 1/a st. 106 (11/re',) 150 (11i,',) Series NCQT Dimensior* ll-Counler Eore ard Thru Diamoter S.H.C.S. 4x2 places H-Thrad l-Depth, NOTE 1. \ 'l type on page 11.

Air Cylinder NCQ7 Series Compact Cylinder

NOTE 1) Female thread length ("1") is shorter tor the lollowing . 106 (r 1/15') r/s & t/a st. 1/s &l/a st. 150 (1Vr') J/s & 1/a st. 1/s & 1/a st. 106 (11/re',) 150 (11i,',) Series NCQT Dimensior* ll-Counler Eore ard Thru Diamoter S.H.C.S. 4x2 places H-Thrad l-Depth, NOTE 1. \ 'l type on page 11.

Modular F.R.L. Unit

11 6.4 115 84 44.5 303 264 43 110 282 98 96 70 50 3.3 318 20 11 11 6.4 117.5 84 44.5 279 45 110 292 98 101 70 50 3.3 318 20 11 117.5 44.5 11 6.4 84 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For response time, refer to the graph below. 400 350 Response time (ms) 300 250 200 150 100 50 0 1 2 3 4 5 6 7 8 9 10 11 12 * This graph shows delay times between gateway unit and controllers. Fieldbus network delay time is not included.

Modular F.R.L. Unit

115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 105 297 Note 1) For AC20 only, the position of the pressure gauge is above the piping center.

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Microspeed Cylinder

Clean Room Series Microspeed Cylinder Series 10-, 11-CM2X Series 10-, 11CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (built-in magnet) Boss-cut front flange type FZ Microspeed cylinder Number of auto switches Bore size 20 25

48

38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10-SYJ5223-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107[111.4] 3 3 3 3 87.4[91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

MXW Series Long Stroke Slide Table

Table Dimensions MXW 25 Stroke: 100, 125, 150 Operating port 2-Rc (PT) 1/8 (mm) J 20 Width across hexagon socket hole 5 Scale:15% 11 Width across flats 17 8H9 +0.036depth 9 0 Operating port Rc (PT) 1/8 9 8-M6 x 1 thread depth 18.5 (Helisert) 8H9 +0.036depth 9 0 Operation direction A Taper thread plug with hexagonal hole 98.6 126 66 55 8 50 37 Y 50 Y 50 11 43 209 Operating port Rc (PT) 1/

Clamp Cylinder with Lock

(for IA type) 2 x M6 thread depth 11 (for YA type) 15 15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

(Nil) Cylinder stroke (mm) Model Lubrication Action Effective cushioning stroke (mm) Bore size (mm) 20 25 32 40 20 25 32 40 Standard stroke (mm) Auto switch mounting Cushion Port size Model 10-REC20 10-REC25 10-REC32 10-REC40 11-REC20 11-REC25 11-REC32 11-REC40 Relief type Vacuum suction type 150 to 700 45 1/8 200 to 1000 150 to 1000 60 50 Double acting Single rod Air cushion (Both sides)