Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

M14 x 1.5 27 1/4 42 11 20 45 153 51 255 52 43 15 59 1/4 stroke 263 271 50 11 M8 x 1.25 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 284 58 52 15 66 1/4 stroke 292 300 63 11 M10 x 1.25 7 18 99 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 58 298 58 52 17.5 66 1/4 stroke 306 314 80 13 M12 x 1.75 10 22 117 17 M22 x 1.5 37 1/2 55 15 23 70 208 71 350 80 65 21.5 80 1/4 stroke 359 368 100 16 M12 x 1.75

VQ7-6/7-8

2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R 3.3 0.27 13 2.8 0.26 11 Rubber seal 50 or less VQ7-8-FPG-D7.0 7.2 Metal seal 60 or less Double check 1.98 VFR VQ7-8-FPG-D-R 7.0 7.2 Rubber seal 60 or less VQ7-8-FIG-D2.8 0.25 11 2.4 0.26 10 Metal seal 45 or less Pressure center VP4 0.75 Courtesy

0.4

Station 9 SOL.B 22 SOL.A 10 Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 VV5Q21 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 56.)

VQ7-6/7-8

2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R 3.3 0.27 13 2.8 0.26 11 Rubber seal 50 or less VQ7-8-FPG-D7.0 7.2 Metal seal 60 or less Double check 1.98 VFR VQ7-8-FPG-D-R 7.0 7.2 Rubber seal 60 or less VQ7-8-FIG-D2.8 0.25 11 2.4 0.26 10 Metal seal 45 or less Pressure center VP4 0.75 VQ7-8

Slider Type/Ball Bushing Bearing

CYP 3.5 7 RB0805 RB1006 RB1411 RB2015 Shock absorber model 5.5 11 Maximum energy absorption: (J) 0.98 3.92 14.7 58.8 5 10 Stroke absorption: (mm) 5 6 11 15 5.5 11 Collision speed: (m/s) 0.05 to 5 4.5 9 Max. operating frequency: (cycle/min) 80 70 45 25 Since the cylinder is in an intermediate stop condition when stroke adjustment is performed, use caution regarding the operating pressure

Cylinder with Lock Series CNS

) 125 300 RLQ 600 500 MLU 400 200 300 MLGP ML1C 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 700 800 3000 160 600 2000 160 140 500 140 125 125 400 1000 Load mass: m (kg) Load mass: m (kg) 700 800 900 300 600 500 400 200 300 D200 -X Individual -X 100 100 100 500 400 300 200 100 500 400 300

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

IZx-OMX0087

400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50

Compressed Air Cleaning Filter Series

The maximum dischargeable drainage rate is 400 cc/min.

Air Slide Table/Long Stroke Type Series MXY

500 280 560 10 4 8 7 6 5 MXY12 3 2.0 Shock absorber Rubber stopper screw 2 4 Load mass W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm, Motor Option: w/o Lock, Vacuum Port: R (Right)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 400mm, Motor Option: w/o Lock, Vacuum Port: R (Right)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 500mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 300mm, Motor Option: w/o Lock, Vacuum Port: Right, Actuator Cable Type: -, Actuator Cable Length: -, Driver Type: -, I/O Connector: -

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: w/o Lock, Vacuum Port: Right, Actuator Cable Type: -, Actuator Cable Length: -, Driver Type: -, I/O Connector: -

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 500mm, Motor Option: -, Vacuum Port: -, Actuator Cable Type: -, Actuator Cable Length: -, Driver Type: -, I/O Connector: -

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 50mm, Motor Option: -, Vacuum Port: -, Actuator Cable Type: -, Actuator Cable Length: -, Driver Type: -, I/O Connector: -

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200