500 601 700 700 420 210 930 620 310 1410 940 470 Maximum Speed Note3) [mm/s] Actuator specification Stroke range [mm] 701 800 550 330 160 750 500 250 1140 760 380 801 900 610 410 200 930 620 310 901 1000 510 340 170 780 520 260 1001 1100 500 440 220 1101 1200 500 380 190 Acceleration/deceleration [mm/s2] 20 (Refer catalog about limit according to work load and duty rate.)
weight kg Load weight kg 80 80 B W 63 63 10 10 50 50 B: Retraction locking F: Extension locking 5 5 40 40 32 32 25 25 1 0.5MPa 0.4MPa 0.5MPa 0.4MPa 1 20 20 0.5 0.5 100 500 100 500 Maximum speed mm/s Maximum speed mm/s 29 Series CLQ Specific Product Precautions 2 Be sure to read before handling.
to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)
to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)
fluid temperature [C] Circulating fluid temperature [C] HRSE018-A-20/23-(T) [50 Hz] [60 Hz] 2000 2000 Ambient temperature Ambient temperature 25C Cooling capacity [W] Cooling capacity [W] 25C 1500 1500 35C 1000 1000 35C 500 500 40C 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE024-A-20/23-(T) [50 Hz] [60 Hz] 3000 3000 Ambient
40 200 Overhang L (mm) Overhang L (mm) Graph (7) Maximum Speed: Up to 800 (mm/s) 20 30 40 50 10 2 3 4 5 Weight W (kg) 40 32 1 0.5 0.4 0.3 0.2 16 25 20 12 0.1 50 100 200 5 20 30 40 10 Overhang L (mm) 8-10-6 6 Model Selection Series MTS Horizontal Mounting 8 Maximum speed: Up to 500 mm/s Maximum speed: Up to 300 mm/s Graph (8) Stroke: Up to 10 stroke Graph (11) Stroke: Up to 10 stroke 0.1
Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate
1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2 1 ML2B25
10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1 5 10 20 50 1 5 10 20 50 8 Series PF2A Dimensions: Remote Type Display Unit for Air (4-channel Flow Monitor) PF2A200, 201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter Front
D-J79C 11-11-20 Connector 11-11-21 D-F59/F5P/J51/J59 Grommet 11-11-22 D-S991/S992/S99V1/S99V2 11-11-22 D-T991/T992/T99V1/T99V2 11-11-22 D-S9P1/S9P2/S9PV1/S9PV2 Grommet 11-11-23 D-S791/S792 11-11-23 D-T791/T792 Direct 11-11-23 D-S7P1/S7P2 11-11-23 Connector D-T791C/T792C 11-11-30 D-F8N/F8P/F8B D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 11-11-31 Grommet 11-11-24 D-F79W
R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.
Type Non-lube Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa CXWM10/16 0.15 MPa Min. operating pressure CXWM20/25/32 0.1 MPa Ambient & fluid temperature 10 to 60C (No freezing) MX Piston speed (Non-lube) 30 to 500 mm/s Cushion Shock absorber MTS Stroke adjustable range Standard stroke: 2 mm Straight knock pin (2 pcs.), Adjusting bolt (-X138) Accessory (Option) MY -X138
MXS8 MXS12 MXS16 MXS20 MXS25 Applicable slide table 19.6 0.98 2.94 5.88 14.7 Max. absorbing energy (J) 12 5 6 7 11 Absorbing stroke (mm) 50 to 500 Max. collision speed (mm/s) 45 70 80 80 45 Max. operating frequency (cycle/min) 814 422 245 245 814 Max. allowable thrust (N) 10 to 60 Ambient and fluid temperature (C) 1.96 1.96 4.22 6.86 6.86 Extended Spring force (N) 3.83 4.22 6.86 15.30 15.98
115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.
Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range.
Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4
Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4
500 Cylinder stroke Maximum speed: V (mm/s) Movement distance of load Step (2) Find the bore size.