REA/REB

50 30 20 20 Usable range 10 10 10 Usable range Usable range 5 5 5 1 0 1 2 3 4 5 6 10 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 1 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 80 REAR40 50 40 30 REAR32 REAR25 20 Load weight

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

OUTLINE DRAWINGS 9 1 to 9 5 9.1 Driver . 9 2 9.2 Connector . 9 4 10.

Aluminum High Vacuum Angle Valve

XLFV (With solenoid valves) High speed operation 10-5 to atmospheric pressure O-ring seal 10-10 10-10 XLG High volume operation (Size 16: None) P.436 to P.447 Double acting XLA XLGV (With solenoid valves) XL XL XLQ XLD XM XY Standard Prevents turbulence of particulates.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

MHZ

10 12 16 2 2.5 3 4 5 6 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5 10.9 14.1 17.9 21.8 34.6 41.4 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 MHZ2-103 (2)(3) 0 0.2 +0.025 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 5.4 MHZ2-163 (2)(3) 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.030 0 7.4 MHZ2-203 (2)(3) 11.6 MHZ2-253 (2)(3) 16 MHZ2

MHZ

0.4 MPa 0.3 MPa 0.2 MPa MHW 5 L MRHQ 0 10 20 30 40 50 Misc.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

13 13 5 5 10 10 5-M5 X 0.8 10 10 5-M5 X 0.8 28 (Piping port) 28 (Piping port) [ ] for AC Other dimensions are the same as the grommet style. [ ] for AC Other dimensions are the same as the grommet style. 1.2-16 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center 3 4 5 G H Grommet (G), (H): SYJ3 40-l ll-M5 10 9 5 10 SY 16.5 33.5 SYJ 2-1.8 (Mounting holes) Manual override

Fieldbus System

End Plate Model EX600-ED2-l EX600-ED3-l Power specifications Power connector M12 (5-pin) plug 7/8 inch (5-pin) plug Power supply (for Control/Input) 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE Marking, UL (CSA), RoHS compliant Weight 170 g 175 g EX600-ED3-l EX600-ED2-l Handheld

High Purity Fluoropolymer

Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Connection threads Symbol 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Connection threads A B C D E F A B C D A B C D A B C D Applicable tubing size (inch) No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 Class Class 1 2 3 4 1 2 3 4 5 6 1 2

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Micro Mechanical Valve Series VM1000

Thickness 5, Width across flats 17 12 10 O.T.

LVQ

Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

type) Normally closed Normally open Port size Bracket Series M5 01 M5 x 0.8 1/8 (10-SYJ700 only) Nil Without bracket F With bracket 3 5 7 10-SYJ300 10-SYJ500 10-SYJ700 3 port (Type 20, 21 manifold) 1 5 10 M SYJ 2 5 WAO M5 Body ported 5 1 SYJ 4 5 WAO 01 10 M Base mounted CE-compliant 3 port Nil Q CE-compliant Sub-plate type, type 40, 41, S41, 42, S42 manifold Body option Electrical entry

Possible to transfer a workpiece at low-speed.

Applicable shaft types: S, W E1 = LL LL DE3 = L3 = Key L1 = X = (mm) (mm) Key dimensions 4 x 4 x 20 4 x 4 x 20 5 x 5 x 25 LL 3 4 5 Size 20 30 40 Size 10 15 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) L3 max X-2 X-2 321 CRQ2X Series (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA59: Shaft Pattern Sequencing II Shaft pattern sequencing is dealt with a simple

HRX-OM-X037

display . 5-9 Current circulating fluid temperature [PV] . 5-10 Circulating fluid set temperature [SP] . 5-10 Circulating fluid discharge pressure [Press PV] . 5-11 Circulating fluid flow rate [Flow PV]. 5-11 Circulating fluid flow rate [DI PV]. 5-11 Operation mode [MODE] . 5-12 RUN/STOP display . 5-13 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status screen . 5-14 5.4.4 Information

CXS

/s 1 Graph V = up to 300mm/s 2 0.5 0.4 CXSL6 0.05 CXSM6 Weight m (kg) Weight m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30

LEC-OM02904

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

HRX-OM-M090

9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018

42

Valve + SUP stop valve spacer (VVQ5000-37A1 5) q AXT632-25-5 (M4 x 82) 4 w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.