MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 8 10 10 14 NT-03 NT-MU03 NT-04 NT-05 One piece is included with the rod end male thread as standard. t 0.9 1.15 1.15 1.15 m 1.5 1.25 1.25 1.75 Snap ring C8 type for pivot C10 type for pivot C10 type for pivot C14 type for pivot Part no.

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

VFS

. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Rotary Actuator

A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number. Grease pack part number: GR-S-010 (10 g) D197 Rotary Actuator: Angle Adjustable Type (Angle adjustment mechanism is provided as standard.)

VS7-6

6, 8, 10 Piping SYJ F.

Magnetically Coupled Rodless Cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

R 3 VDC 8 One-touch fitting C8 10 One-touch fitting 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting 2(B) (A)4 Rated voltage 10-SY7000 C10 C8 C10 C12 3 For AC ( Hz) 50 60 Thread type (EA)5 1 (P) 3(EB) 1 100 VAC 2 200 VAC 10-SY9000 Rc Nil 3 position exhaust center F G 2(B) (A)4 3 110 VAC [115 VAC] N NPT One-touch fitting (Inch size) 4 4 220 VAC [230 VAC] NPTF T Symbol Port size

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Manifold Type: 42P (Base Mounted, Bar Manifold, External Pilot Capable, Flat Cable), Valve Stations: 8 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Manifold Type: 42P (Base Mounted, Bar Manifold, External Pilot Capable, Flat Cable), Valve Stations: 8 Stations, A, B Port: N9T (5/16" One-touch Fitting)

Manifold Type: 42P (Base Mounted, Bar Manifold, External Pilot Capable, Flat Cable), Valve Stations: 8 Stations, A, B Port: 02 (Rc1/4)

Manifold Type: 42P (Base Mounted, Bar Manifold, External Pilot Capable, Flat Cable), Valve Stations: 8 Stations, A, B Port: 02T (NPTF1/4)

Manifold Type: 42P (Base Mounted, Bar Manifold, External Pilot Capable, Flat Cable), Valve Stations: 8 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Manifold Type: 42P (Base Mounted, Bar Manifold, External Pilot Capable, Flat Cable), Valve Stations: 8 Stations, A, B Port: C8 (ø8 One-touch Fitting)

Manifold Type: 42P (Base Mounted, Bar Manifold, External Pilot Capable, Flat Cable), Valve Stations: 8 Stations, A, B Port: 02N (NPT1/4)

Manifold Type: 42P (Base Mounted), Valve Stations: 8 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Manifold Type: 42P (Base Mounted), Valve Stations: 8 Stations, A, B Port: N3T (5/32" One-touch Fitting)

Manifold Type: 42P (Base Mounted), Valve Stations: 8 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Manifold Type: 42P (Base Mounted), Valve Stations: 8 Stations, A, B Port: 01 (Rc1/8)