Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 11 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, A, B Port: 5/32" One-touch Fitting, Mounting Method: -

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Lateral Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø6 single-action pipe fitting (A-, B-Port) / ø8 single-action pipe fitting (P-, E-Port), Specification: Internal Pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Lateral Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø1/4" single-action pipe fitting (A-, B-Port) / ø5/16" single-action pipe fitting (P-, E-Port), Specification: Internal

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Lateral Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø1/4" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification: Internal

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

Compact Manifold Regulator Series ARM5

19 20 6 6 8, 5/16 8, 5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

Large Size Vacuum Module: Series ZR

ZS-10-5A-50 . 1 pc.

ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

modular-press-e

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

Modular F.R.L. Pressure Control Equipment

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

Mechanically Jointed Rodless Cylinder Series MY1

MY1B10G Stroke 10 10 7.3 7.8 2 x M5 x 0.8 (Hexagon socket head plug) 2 x 2 x 3.4 through-hole Bottom side M4 x 0.7 depth 7 4 x M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2 x M3 x 0.5 thread depth 5) 2 x 5 counterbore depth 2 25 24 3.5 1 2 x M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

PSxx-OMM0006CN

DC1224 V10 DC1224 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -57No.PS-OMM0006CN-E No. 14 15 , 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -58No.PS-OMM0006CN-E , 80 mA 7F.S.(3.5F.S.) 1 1F.S. 1 -59No.PS-OMM0006CN-E (M8(3 )62 ) ZSE40A() ZSE40AF() ISE40A() 0-101.3 kPa -100.0100.0kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0kPa

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

4 Port Solenoid Valve Series VQD1000

"#$ %&' % & ' ( ) * + % & ' ( ) * + Series VQD1000 Dimensions/Base Mounted Plug lead manifold unit (VV4QD15-) Lead wire length 300 mm (P,R port) For latching Indicator light B C A B C A B C A B C A B C A 2 x 4.5 (Mounting hole) (59.7/latching type) 57.5 52.5 3(R) 51 3(R) 16 9 32 1(P) 17 1(P) 10 10 P = 11 4 36.5 L1 L2 4 41.5 45 C4: 4 One-touch fitting M plug connector (M) Stations D side

EtherNet/IP TM Compatible Fieldbus System

Power supply for solenoid valves: 24 VDC +10%/-5% 68 No.EX-OMS0014-A Fault No. 10 Fault Possible cause Investigation method Countermeasures Tighten the branch cable connection. (if there is a broken wire, replace the cable) Power supply for input and control: 24 VDC 10% SI unit PWR LED is OFF. Check the branch cable connections and check for broken wires.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2