Integrated Controller

200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

M plug connector Rated voltage 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 4 5 6 7 9 Solenoid valve configuration Single solenoid Double solenoid Closed center Exhaust center Pressure center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking B type Locking C type Nil B C 240 VAC, 50/60 Hz Other Without auto switch B S 50 90 1 1 G CVRA1 B S 50 90 1

1

Standard external (B) 17 25 35 36 46 60 70 86 100 Dimensions except mentioned above are the same as standard type.

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Water-cooledThermo-chiller

0 1 2 4 3 5 gpm 4 2 8 6 gpm 10 14 12 145 130 130 Circulating fluid pressure (psi) Circulating fluid pressure (psi) 120 120 Outlet pressure [60 Hz] 100 100 90 90 Outlet pressure [60 Hz] Outlet pressure [50 Hz] 75 75 60 60 45 45 Outlet pressure [50 Hz] 30 30 Return port pressure 15 15 Return port pressure 0 0 0 5 10 15 20 25 30 35 40 45 50 55 60 0 2 4 6 8 10 12 14 16 18 20 Flow rate (L/min

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] With surge voltage suppressor (Non-polar type) T With light/surge voltage suppressor (Non-polar type) With surge voltage suppressor (Non-polar type) Power saving circuit is not available for W type.

Tie-rod Type Hydraulic Cylinder

M8 x 1.25 M14 x 1.5 18 20 60 18 44 22 44 77 1/4 25 14 30 9 16 10 50 19 50 25 9 73 115 17 13 M10 x 1.5 M16 x 1.5 20 22 73 20 53 26 53 95 3/8 28 17 30 11 22 10 63 21 55 28 8 80 122 17 13 M10 x 1.5 M18 x 1.5 22 25 80 22.4 60 26 60 102 3/8 30 17 30 11 20 12 80 26 65 M12 x 1.75 32 8 100 155 20 15 M22 x 1.5 26 29 100 28 75 30 75 130 1/2 32 22 35 13 26 12 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118

CA2

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-TT TH TD TF TS 4-TR TY TC TA TL TU TU Z TD-H10 (Hole) Bore size (mm) TA TL TU TC TX TE TO TR TT TS TH TF TY Part no. 40 +0.070 0 85 9 60 60 10 102 119 17 17 12 45 62 93 80 15 CA2-S04 50 +0.070 0 95 9 60 60 10 112 129

Free Mount Cylinder

60, 70, 80, 90, 100 Weight/( ): Denotes the values with D-A93.

Mechanically Jointed Rodless Cylinder Series MY1

Table (1) (mm) 50 63 Bore size (mm) 6 to 26 14 to 54 87 60 MY1W A to A Max. B to B Max.

33

Hz 230 VAC 50/60 Hz 191 Thermo-chiller Basic Type HRSE Series Circulating Fluid Temperature Controller Simple function and performance Cooling capacity 1.2, 1.6, 2.2 kW (60 Hz) Power supply 100/200 VAC (50/60 Hz) 230 VAC (50/60 Hz) Triple control Compressor, fan and electronic control valve can be controlled depending on the heat load from the user s equipment.

MHZ2/MHZJ2

, 0.7MPa 0.6MPa, 0.7MPa 20 20 MHZ2/Standard 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm H H MHZ 2-20 MHZ 2-20 Gripping point 100 L 80 Pressure 0.2MPa 80 Pressure 0.2MPa Overhang H mm Overhang H mm 60 MHZJ2/With dust cover 60 0.6MPa 0.3MPa 0.7MPa 40 0.4MPa 0.5MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 40 20 20 0 20 40 60 80 0 20 40 60 80 100 Gripping point

Free Mount Cylinder Series CU

60, 70, 80, 90, 100 Mass/( ): Denotes the values with D-A93.

Base Mounted Metal Seal/Rubber Seal Series VQ

Coil rated voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Wiring Specifications The lead wires are connected to the valve as shown below. Connect each to the power supply side.

Information

/60 Hz) (kVA) Noise level Note 10) (50/60 Hz) (dB) 60/61 Fitting (for drain outlet) 1 pc.

Series AP500

80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 70 0.48 60 0.41 Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Connections A 40 0.28 (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 (94.0) 3.70 30 0.21 2.96 (75.2) 20 0.14 4.70 (119.4) 10 0.07 2.96 (75.2) 0 0.00 0 20 40 60 80 100 120 140 160

SYJ300/500/700

Power saving circuit is only available in the Z type. 3 220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 For type W, DC voltage is only available.

ZP

60 50 0 to 120 30 to 200 0 to 60 0 to 250 20 to 150 X X X X The above table covers only general characteristics of subject rubber materials.

Environment

30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note 4) Note 5) 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 Speed [mm/s] Note 5) 18 to 400 9 to 200 5 to 100 24 to 400

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Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.