Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

l \ l l / v \ d l / t , . 1 , \ 1 b d t / . , , . , \ 1 6 -;i;-5*1-rTNVZ3420 NVZ3440 ^^n+irrr. umiint^ 4r&.q+\rh *"s* NVZs120-OM-M5 NVZ3540 Wry NVZ3140-OM-017 NVZ352O Model Body type )a of aqtuation ry:,:' sl:c i 2 position Single N\23120-OO-n5 o.2 0.17 Double Nvzlt220-OO-r5 o.2 0.26 (120) 3 position Closed center N\rz3it20-OO-[|5 0.18 0.43 (195) 10-32 Nom.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Order w y e r t u i q LEKFS 32 E A 300 R1 CD17T q Size w Motor mounting position e Motor type r Lead [mm] 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*2 R3 3 RB 15*2 R5

Title not found

l \ l l / v \ d l / t , . 1 , \ 1 b d t / . , , . , \ 1 6 -;i;-5*1-rTNVZ3420 NVZ3440 ^^n+irrr. umiint^ 4r&.q+\rh *"s* NVZs120-OM-M5 NVZ3140-OM-017 NVZ3540 Wry NVZ352O Model Body type )a of aqtuation ry:,:' sl:c i 2 position Single N\23120-OO-n5 o.2 0.17 Double Nvzlt220-OO-r5 o.2 0.26 (120) 3 position Closed center N\rz3it20-OO-[|5 0.18 0.43 (195) 10-32 Nom.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Indicator light 3.5 to 7 : AC 82.5 75 01 02 M plug connecter (M): VQZ2l5(R)-lMl56.5 Cover dia 1.5 Cross section 0.23mm2 (Lead wire) 58(63) 300 77(78) 89 Indicator light : AC 2.10-29 VQZ100/200/300 Base Mounted VQZ300 Valve single unit Grommet (G): VQZ3l5(R)-lGl02 03 37 5 2-4.5Mounting holes 23.5 5 R5 Cover dia 1.6 Cross section 0.34mm2 Manual override 2 A 45 18 3 R 1 P 47 76 300 (Lead wire

VQZ1000/2000/3000

5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Indicator light 3.5 to 7 < >: AC 82.5 75 M plug connector (M): VQZ25(R)-M01 02 56.5 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 77.5 58 <63> 300 89 Indicator light < >: AC 4-14-31 Base Mounted 32 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ35(R)-G02 03 37 5 2-4.5 mounting hole 23.5 5 R5 Cover dia. 1.6 Manual override Cross section 0.34 mm2 2 A 45

LX Series Compact Electric Actuators

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

r5 L+' tL-l-s!" 5 (+ (Note 1)Maximum slalion I (Nole2)(+)aid()indicabnredireclionolDCsolnoidvalvewthliqhi.su'ge!olagesdppreser iNole 3) Seds VFS3o0HOM ls also Dossible aNote 1 I [,!

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Indicator light 3.5 to 7 82.5 75 01T 02T M type plug connector (M): VQZ2 5(R)M 56.5 (Lead wire lnegth) Cover diameter 1.5 Cross sectional area 0.23mm2 58 300 77 89 Indicator light 28 Base Mounted Type Series VQZ Dimensions: VQZ300 VQZ300 (mm) Valve Scale: 45% Grommet (G): VQZ3 5(R)G 02T 03T 37 5 2 4.5 Mounting holes 23.5 R5 Cover diameter 1.4 Cross sectional area 0.2mm2 Manual override 2

-fl Seies

r5 L+' tL-l-s!" 5 (+ (Note 1)Maximum slalion I (Nole2)(+)aid()indicabnredireclionolDCsolnoidvalvewthliqhi.su'ge!olagesdppreser iNole 3) Seds VFS3o0HOM ls also Dossible aNote 1 I [,!

Air Pilot Operated Series NVSA

NXT 333-17.5 B E ll K N 1 . 1 0 (2S) 1 0 6 \n) 0.63 i16) 1.42 t36) 0.91 t23) 0.61 05.5) 1.26 (32J 4.50 [1',l9) 1.95 (49.5) 1,99 i50.s) 1.52 (38.s) 1.48 {37.5) r5 Soacer "A" End AXT 333.10 Mi[imebrs in Paronlhes6 1t DIRECTIONAL AIR VALVE SUBPLATES SERIES NVSA 4@14 f:'-f b'd-T-',"S Genral: Sub'plales arc heavy duty aluminum die castings.

Air Pilot Operated

NXT 333-17.5 B E ll K N 1 . 1 0 (2S) 1 0 6 \n) 0.63 i16) 1.42 t36) 0.91 t23) 0.61 05.5) 1.26 (32J 4.50 [1',l9) 1.95 (49.5) 1,99 i50.s) 1.52 (38.s) 1.48 {37.5) r5 Soacer "A" End AXT 333.10 Mi[imebrs in Paronlhes6 1t DIRECTIONAL AIR VALVE SUBPLATES SERIES NVSA 4@14 Genral: Sub'plales arc heavy duty aluminum die castings.

10

U side 7 6 5 4 3 2 D side Stations 1 Cable 6 to 12 G1/2 G1/2 (44) R3 R4 T E D R1, R6 R5 R2 F F n x 1/8,1/4 OUT port (For common SUP type) IN port (For individual SUP type) (mm) n (stations) Size Dimensions 2 3 4 5 6 7 8 9 10 86 100 90 108 103 121 L1 L2 L1 L2 L1 L2 122 136 126 144 144 162 158 172 162 180 185 203 194 208 198 216 226 244 230 244 234 252 267 285 266 280 270

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

G 32 M D G B 30 C R1 C5H73 Size Motor type Motor mounting position Bearing type 25 32 40 Symbol Motor Compatible Nil Top mounting M Sliding bearing controller D In-line JXC5H JXC6H JXC9H JXCPH JXCEH High performance G Battery-less absolute Step motor 24 VDC Lead [mm] Actuator cable type/length [m] Symbol LEG25 LEG32/40 Robotic cable[mm] 6 8 Nil None R1 1.5 Stroke [mm] R3 3 30 30 50 50 R5

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

JXCD1 JXC61 D4 Lower side R Right side parallel (4)Lead [mm] L Left side parallel Size *For size 8 8 16 25 10 12 16 (2)Motor mouting position 5 6 8 In-line D C 2.5 Right side parallel R Left side parallel L *For size 16/25 (5)Storke [mm] (7)Actuator cable type/length Robotic cable [m] (8)Controller Size #Please refer to the catalog for the controller part. 8 16 25 Without cable Nil R1 R3 R5

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

R1 1.5 RA 10 * R3 3 RB 15 * R5 5 RC 20 * Applicable Stroke Table *Produced upon receipt of order Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Controller *Refer to catalog 16 25 32 40 Caution The actuator body and controller are sold as a package.

Compact

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

Metal Seal/Rubber Seal Series VQ Body Ported

235.5 225 235.5 237.5 248 250 260.5 262.5 273 L3 L4 100 110.5 2-4-40 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type VQ2000 55.5 (L plug connector) AC, Latching Manual override 50.5 (L plug connector) VQC L4 L3 49 (L plug connector) 5.2 AC, Latching L2 L1 52.5 SQ 44 (L plug connector) 48 Indicator light DIN rail clamp screw 5.5 31 VQ0 12 D-sub connector mounting screw VQ4 VQ5 R5

Title not found

Drarn guide 1/4 AF30 to 60 Flow direclion: Right to tefl AF10 to 60 Drain cock wiih barb fitting: 06 x 04 nylon tube AF30 to 60 Nole 1)Without a valve Display unils for product name piEle and cauion plate lor bowl :PSl,'F AF10 to 60 lypes M5 and NPT Port size syn P9d ro stze 20 30 40 50 GO l\r5 a '|8 a 1t4 a a a 3t8 a a a 3/4 a a '1 a a Float lype auto drain (N.O.)