Compact Type

2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Digital Flow Switches Series PF2A

output 1 to 5 V (within the flow rate range) Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.

Series PF2W Digital Flow Switch For Water

Note 1) 5% F.S.

Direct Solenoid

(5), Bottom Ports (5) 05 = Mounted oo Individual Subplate 1'NPTFSidsPorts(5) 06 = Mounted on lndividual Subplate 3/4" NPTF Side Ports (5) DIRECTIO}IAL AIR VALVES DIMENSIONS/PARTS LIST NVS424, NVS *u, orro, 41.*,41M t!.

Speed Controller with One-touch Fitting

Inch size 1/8" 1/4" 5/32" 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.2 0.3 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance Controlled flow 0.2 0.3 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 dm3/(sbar) Free flow 0.3 0.4 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.2 0.3 0.3 0.3

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 11-9-20 21 Rotary Table Series MSQ Dimensions: Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type: MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA counterbore depth JB 22.5 CRB2 BE CRBU2 CRB1 WF 2-M5 x 0.8 Piping port (Plugged)

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) LM Ports 2, 4 size (inch) Nil PNP (+) or without SI unit/input block (SD0) Ports 2, 4 Symbol N3 N7 N9 NM Ports 1, 3, 5 NPN () N 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Mixed Top ported elbow 5/32" One-touch fitting Top ported elbow 1/4" One-touch fitting Top ported elbow 5/16" One-touch fitting Bottom ported elbow 5/32" One-touch

IDX-OM-M051

Remove the side panel and the plug 5 in the body, and open the stop valve 4. 4. Be sure to mount the plug 5 after draining the water, and close the stop valve 4 in the body. 5. Return the panel to the original position. 4. Stop valve in the body 5. Plug 4. Stop valve in the body Automatic fluid filling valve 5. Plug 2. 3.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 !6 !7 !8 !

ZX

ZX1-W05 0.5 5 13 Nozzle dia.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

5 GB 5 5 GA 8 8 F 4 5 D 15 15 A 10 16 Bore size With air cushion With air cushion type is not available for 21-/22-CJ2.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

GA 8 8 GB 5 5 H 5 5 MM 28 28 Bore size With air cushion Air cushion type is not available for 21-/22-CJ2.

SMC Pneumatic Clean Series

5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101 121 Other dimensions are the same as basic style.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

Series AP500

No code M V X 4) PTFE recommended for applications such as within a process tool. 5) Not available with SH material.

EXxx-OMU0020CN

HW ConfigEX245-SPN1 HW Config Module information 1 . 5-1 1 US2 DiagnosisEnable /(US2)2 EX245-DX147 39 No.EX-OMU0020CN Module information (General) . 5-2General (IO Device Diagnostics) . 5-3IO Device Diagnostics 40 No.EX-OMU0020CN 2 . 5-4 2 EX245-SPN1 1 3 EX245-SPN1 1 Module information (Communication Diagnostics) . 5-5 Communication Diagnostics 41 No.EX-OMU0020CN 3 . 5-6 Communication

EXxx-OMN0035CN

No. 1 LED 2 () 3 4 5 () -18No.EX-OMN0035CN-A EX600-DXE No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () EX600-DXF No. 1 LED 2 () 3 4 5 () -19No.EX-OMN0035CN-A (1)EX600-DXB/EX600-DXD 1 24 V() 2 2 3 0 V() 4 1 5 FE M12 (4 ) EX600-DXPB/EX600-DXPD EX600-DXNB/EX600-DXND 1 24 V 1 24 V 2 2 2 2 2.7 k 2.7 k DC24 V DC24 V 3 0 V 3 0 V 4 4 1 1 2.7 k 2.7 k 5 5 FE FE

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2