CLA ~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !
Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PF2MC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket With mounting screws for PF2MC7202 (M3 x 5, 2 pcs.)
Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 5/16" 3/16" 1/4" 1/8" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow Direction Symbols on Body Meter-out type Meter-in
SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.
1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !8 r ^2 t #6 #7 #8#5#9 $7 %5 ^0 MLGC CNG $2 ^3 ^9 ^0 &0 180, 200, 250 Steel tube Component Parts Component Parts MNB No. Description Material Note No.
Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40
" L2 M1 1/4" 5/32" O 1/4" 5/16" L1 N 3/8" 5/16" M2 3/8" 1/2" Note 1) D is maximum diameter.
[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.
Cable size Crimped terminal on the rated current thermo-chiller side HRS100-Al-20-l HRS100-Wl-20-l 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 30 A M5 HRS150-Al-20-l HRS150-Wl-20-l 40 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-Al-40-l HRS100-Wl-40-l 3-phase 380 to
Enable Generates an error. 1 -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. 2 Analogue input range (Range) Selects the analogue input range. -10..10 V 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit. 2s complement 2s complement.
AR4 5 AR6 5 AR8 5 AR9 5 Description Model B24P B25P Bracket Pressure gauge with limit indicator Note 1) B24P B25P G46-1002 (Max. 1.0 MPa), G46-202 (Max. 0.2 MPa) Note 1) In the gauge part no. (e.g. G46-1002), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.
2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 17 Rotary Table Series MSQ Dimensions/Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type/MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA depth of counter bore JB 22.5 BE WF 2-M5 x 0.8 Piping port (Plugged) BD Effective depth FB
AR4 5 AR6 5 AR8 5 AR9 5 Description Model B24P B25P Bracket Pressure gauge with limit indicator Note 1) B24P B25P G46-1002 (Max. 1.0 MPa), G46-202 (Max. 0.2 MPa) Note 1) In the gauge part no. (e.g. G46-1002), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.
9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.
10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).
10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).
W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100