IDX-OM-W053

T 4-2-3 100 2 () 100 4 1 4 0 OFF 501015 OFF OFF IN/OUT ( ) 4 2 4 ) 30 () 30 O 4 3 4 AD48-A 1 ) 2019 3 2019 2 SERIAL No.XP AD48 SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S1933 1 2 4 4 5 5 5-1 3 ON OFF 600mm 1 10% () ( ) 60cm 1 10% 3 5 1 5 () 60cm 1 2 INOUT INOUT () 5 2 6 6 6 1 IDFA6E-2050Hz 0.75 m 3/h (ANR) 1 60Hz 0.82 0.7MPa 35 32 10 oC 550 0.15MPa 1.0MPa

IDX-OM-W032

IN 3-1 IDFA Series 3 1 IDX-OM-W032 3 / 3-3 OFF 3-4 3 3 5 3-5 OFF 3-6 24H 3-3 IDFA Series 3 2 IDX-OM-W032 4 4-1 5 310 /13-1 4-2 4-2-1 4-2-2 1. 100 2 () 100 -T IDFA Series 4-1 4 1 IDX-OM-W032 4 4-2-3 OFF 501015 1 OFF INOUT IDFA Series 4-2 4 2 IDX-OM-W032 4 30 30 (2) O AD48-A 1 C42FP-260S 1 111692 1 1 2019 3 2019 2 SERIAL No.XP AD48 SMC WEB IDFA Series

KFx-OMY0077

Refer to the recommended piping conditions. (4) Do not apply unnecessary forces such as 100 2d D L 1 = Mandrel twisting, pulling, moment loads, vibration and impact, etc. on fittings or tubing. This will cause damage to the fittings and will crush, burst or release tubing. 5 - 2.

KFx-OMY0034

D L 1 (2) Winding of sealant tape 100 2d When screwing together pipes and fittings, etc., be Mandrel certain that chips from the pipe threads and sealant do not get inside the pipe. Also, when the sealant tape is used, leave approximately 1 thread ridge exposed at the end of the threads.

PSxx-OMS0006CN

) / OFF ("o") P_1(n_1)1/10 P1HP1L(n1Hn1L)1/4 -1/7 -1/4 OFF -1/7 -1/4 -39No.PS-OMS0006CN-G OFF () [F82] OFF -40No.PS-OMS0006CN-G [F11] <> [F11] 1000 100 [F11] , 2]/[bar]/[psi]/[inHg] [MPa]/[kPa(ZSE20(F)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 28[F 0] -41No.PS-OMS0006CN-G [F80] 30 <> [F80] [F80] 30 () [ECo] (ON) ON OFF -42No.PS-OMS0006CN-G [F81] <> [F81] [oFF]() () (000

PSE5xx.eng

When piping, apply a spanner to the piping section of the sensor. 5 6 Safety Instructions PSE5 #-28 Current output: 4 to 20 mA Allowable load impedance: 500 or less (at 24 VDC) 100 or less (at 12 VDC) Wiring Warning Attaching the connector to the sensor wire Strip the sensor wire as shown below. Do not cut the insulation.

SI unit for CC-Link

Applicable solenoid valve series Representative series Applicable series SQ series SQ1000, 2000 series SZ series SZ3000 series -18No.EX-OME0011-H Dimensions -19No.EX-OME0011-H Revision history B: New format C: Error correction D: Add the precautions and change into the latest format E: Terminal screw change F: Modified errors in text.

Stations: 05 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: without Leadwire, Unit Options: C [Vacuum Pump System PE Port Female Thread

System: Q (Vacuum Pump System for Manifold), Valves: R (Supply Valve; Self-holding, Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs), Connector: L3 (L-type Plug Connector), Vacuum, V Port: 08 (Metric Size, ø8 One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: C (with Pump System PE Port

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: R (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / PNP 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: E (Vacuum Break

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: R (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / PNP 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: E (Vacuum Break

Digital Flow Switch for Water Series PF3W 3-color display ®

Bracket (Option) 11 $ 40 $ $ 20 $ $ 21 $ None Yes Nil S None Bracket Nil Note 1) 100 and 250 L/min types with flow adjustment valves are not available. Note 2) The flow adjustment valve of this product is not suitable for applications which require constant adjustment of flow rate.

4 Port Solenoid Valve Series VQD1000

''()% ,)# % # ## ., & /, '# & , . '0 23/ 414 e u q t r y !0 V100 S070 i VQD o 23/ 4#40 56"4!4 ! VKF w /, 1 !() '!2 VK VT VS & "# # & # ''()% * 8 7 23/ 9 : : 7 23/ : 7 9;9 8 : (; ! (7( :9 : (<8 9( = ' Series VQD1000 # $ % "" "" " ! ! " & ! " * $ & "( ' " ' ( ) " " Series VQD1000 !""#"$$ # !""#"$ $ # VV061 !

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

With scraper Mounting Through-hole Both ends tapped Rear clevis Screw clearance hole, front mount Screw clearance hole, rear mount Screw clearance hole, through B A C E M N Note 3) XB6: Not available with magnet. *Refer to page 36. Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: R (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / PNP 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: E (Vacuum Break

Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

(Example) CDM2F32-100 Air-hydro type: Rc only G Nil Without auto switch Built-in one-touch fitting For the applicable auto switch model, refer to the table below. Applicable Auto Switch/Refer to pages 1263 to 1371 for further information on auto switches.

Super Mist-Separator NAME Series

Super Mist-Separator NAME Series Filtered air exceeds clean room class 100 specifications Removes virtually all Oil mist above 0.01prm particle size. Activated carbon elernent provides superior filbation and longer element life. (10 times NAMD Micro-mist separator) Special color changing element allows vbual monitodr of elernent life.

For Water Digital Flow Switch Series PFW

106 Model PFW704 PFW720 PFW740 1.6 23 64 120 FLOW SWITCH U P S E T 34 60 50 OUT1 OUT2 DOWN FOR WATER 2-Port size 34 4-4.5 40 50 (41.5) 73 Flow direction 24 For Water Digital Flow Switch Series PFW Dimensions/Remote Type Sensor Unit for Water PFW504/520 Wiring L 56 1.6 6 60 48.2 17 Brown (1) DC (+) Main circuit Black (4) OUT 34 54 44 Blue (3) DC () Use this sensor by connecting it with

High Precision Digital Pressure Switch with 2-color Display Series PSE300/540∗

Series Pressure range 0~-101kPa PSE541 Vacuum pressure -101kPa 0Pa For air -100~100kPa PSE543 Compound pressure 100kPa -100kPa

Pneumatic Positioner IP300/IP3100

For all other options, allow extra dlivery timE. 4grrc 1P3100 SPECIFICATIONS Unit acts as a 3-way or 4-way proportional position control valve (single or double acting) Supply Pressure 20 100 psi (1 .4 7.0 kg cm'z) Signal Pressure 3 15 psi (0.2 1 .0 kgficm') Sensitivity Less Than 0.3olo Linearity Within +2% FS. Hysteresis Less Than 1% FS. Repeatability Within :t0.5% FS.