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AR20K io 60K Flor / drreclion: Bigh 10 leli AR10 to 60.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Note) L1 to L4 dimensions of SS5X345GUStations Uare the same as SS5X3-45GUStations D-. 2 Stations 3 4 5 6 7 8 9 10 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 123 L1 L2 L3 L4 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5X3-45GUBC4 C6 Stations 2 3 4 5 6 7 8 9 10 135.5 125 108 13.5 148 160.5

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -32- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

IDX-OM-V020

Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR

Angle Seat Valve /

/N.O. 1/4 to 50A 10 to 12 N.C.

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

MHS

77 118 187 329 490 3H10 3H10 4H10 6H10 10H10 12H10 16H10 20H10 mm 4 4 6 8 8 12 16 20 g 90 140 220 410 570 970 1,650 2,920 1) 1625 =20mm 3263 =30mm 80 =50mm 0.5MPa MHSH3 / MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3

3 Position Cylinder Series RZQ

33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 14 32 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 40 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 50 45 M16 x 2.0 84 130 102 21 77 39.5 16.5 15 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 36.5 21.5 18 4.5 10.5 6.5

IDX-OM-W020

S 10 S 10-1 10-2 IDFB3E PE 10-1 IDFB Series 10 1 IDX-OM-W020 10 S IDFB4E 11E PE IDFB15 PE 10-2 IDFB Series 10 2 IDX-OM-W020 11 T 11 T 11-1 IEC 11-2 AC115V,5A DC24V,5A (20V,5mA(AC/DC)) 11-3 ON ON/OFF 3 () 5 /1 () 11-1 IDFB Series 11 1 IDX-OM-W020 11 T 11-4 IDFB4E 11E PE 1 2 3 : 0.25inch (6.5mm) : 0.002inch 2 (1.25mm 2) 0.003inch 2 (2mm 2) : 0.0008inch 2 (0.5 mm

RSH

20 7 8 36 32 64 20 73 93 16 128 30 221 45 9 63 18 depth 6 103 107 24 12.5 20 8.5 10 45 40 77 25 90 114 24 144.5 30 251.5 54 11 80 20 depth 6 132 128 35 12.5 25 10 10 45 50 98 25 110 138 24 171.5 40 299.5 56 13 SRSH Bore size A, #1 (#1+#5) : RSH Bore size -lll Basic w/locking mechanism w/cancel cap w/lever detection switch w/locking mechanism + cancel cap w/locking mechanism + lever detection

Pressure switch for energy-saving control ejector with N.O. type valve

In case of P_1-60 kPa, enter 45 to H_3. (The equation will be changed to P_1H_3-60-45-105, so the vacuum pressure does not reach the point where the energy-saving function is triggered.) * The minimum value of P_1H_3 is -105.

VCW

) 10 is N.C.

LV50-OMQ0002

Remarks Weight With lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

IC

VE 4 point preset output pressure Applicable in the programming function with up to 20 steps. 10 bit parallel input signal (maximum) Pressure can be set with 2 10 = 1024 steps. VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

Return Filter FH100 Series

: 1 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m Differential pressure indication switch Operating pressure0.13 MPa When a value has been displayed, it will be automatically reset when the pump is stopped.

PFxx-OMO0004CN

L/min 10 L ON OFF ON OFF 0 -14No.PF-OMO0004CN-E , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 ripple -15No.PF-OMO0004CN-E AB.

Coolant Valve

SGC SGH Large valve capacity VNC VNC Av factor 30 x 10-6 to 1600 x 10-6 (VNC1 to VNC7) Cv factor 49 to 100 (VNC8 to VNC9) VNH VND VCC TQ 617 Coolant Valve: Air Operated/External Pilot Solenoid VNC Series [Option] Note) CE-compliant: For D or DZ only How to Order Thread type Seal material Bracket (Valve size: 1/2/3/4) A B Rc G NPT NPTF Nil F N T NBR seals FKM seals None With bracket (VN-16

Clean Air Module

Clean regulator ID Digital flow switch With flow adjuster Air operated valve 36.5 PA pilot port M5 IDG With differential pressure indicator Pressure outlet port Rc 1/8 Restrictor Clean air filter IDK One-touch fitting 10 Note) One-touch fitting 10 PB AMG PA 76 37.5 AFF 25 13.2 (47.5) 60 49 (77.5) 25 45 45 AM 349 Note) This port is unavailable.