Digital Flow Switch (Integrated display type)

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

ZQ-OM01401

60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD)() ZQ000A (PD) 80 80 0.45MPa 70 70 [L/min(ANR)] [L/min(ANR)] 0.5MPa 0.35MPa 60 60 50 50 0.25MPa 0.35MPa 0.3MPa 40 40 0.15MPa 30 30 20 20 0.05MPa 10 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD) 80 70 [L/min(ANR)] 0.45MPa 60 50 0.35MPa 40 0.25MPa 30 0.15MPa 20 0.05MPa 10 0 0 1 2 3 4 5 [] 38 - No.ZQ-OM01401-B V [L/min

Digital Gap Checker ( compatible)

When a key operation is not performed for 30 seconds, the display will return to the display OFF mode (Power saving is enabled in measurement mode only).

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

LX Series Compact Electric Actuators

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

High Vacuum Angle Valve, XL Series

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

Flow Sensor Series PFMV

Max. current rating No load voltage (V peak) 5.0 0 to 20 [V] 100 Above 20 to 30 [V] Peak voltage (2) A circuit using max. 30 Vrms or less (42.4 V peak), which is powered by UL1310 or UL1585 compatible Class-2 power supply. 963 Series PFMV5 Specific Product Precautions 2 Be sure to read before handling.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

S Couplers Series KK/KKH/KK13

or more 38 or more 39 or more 56 or more 58 or more 70 or more 76 or more 82 or more 118 or more 144 or more 16 or more 20 or more 24 or more 30 or more 32 or more 40 or more 50 or more 48 or more 60 or more 64 or more 80 or more 3.2, 1/8" 4, 5/32" 3/16" 6 1/4" 8, 5/16" 10 3/8" 12 1/2" 16 T 28 to 30 NPT, R 1/2 28 to 30 NPT, R 3/4 36 to 38 NPT, R 1 40 to 42 NPT, R 1 1/4 48 to 50 NPT, R 1

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT75C-20 IDF75C-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

XMC/XYC Series

Bonnet assembly/construction part number:1 Valve size Temperature specifications 16 25 40 50 General use XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 High temperature XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 Valve size Temperature specifications 63 80 General use XLC63-30-1-1 XLC80-30-1-1 High temperature XLC63-30-1H-1 XLC80-30-1H-1 Note1) The magnet for auto switch is not provided

MGP

1216 30 1216 30 2025 100 3263 100 15 17-2.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Mount the pipe 21 to the sub-plate 18 19 and 30 and fix with hexagon socket head cap screws 22 31 to the body 1 . 8. Mount the O-ring 25 to the solenoid valve 29 and fix with hexagon socket head cap screws 23 to the sub-plate 18 . 9.

MHC2

MHZ MHC2/MHCA2/MHCM2 MHF MHL F MHR L MHK MHS F MHC MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S MHT Pressure 0.6MPa 4 4 2 MHY Pressure 0.6MPa 0.5 Pressure 0.6MPa MHW Gripping force N Gripping force N Gripping force N 3 3 0.4 MRHQ 0.5 0.5 Misc. 2 2 1 0.3 0.4 0.4 D0.2 1 1 0.3 200 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

stroke 20, 25: Over 30 stroke 30 stroke or less MVGQL32 to 100 CV MVGQ 50 stroke or more Replacement Parts Kit no.

MHC2

20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/MHCA2/MHCM2 Confirmation of Inertial Moment of Attachment Step 2 Confirm the inertial moment of one of the two attachments.

VFR

Note 2) Min. operating frequency is once in 30 days.

AWG

Flow Mechanism Series AWGK AWG20K 1/8, 1/4 AWG30K 1/4, 3/8 AWG40K 1/4, 3/8, 1/2 Pages 34 to 38 30 Filter Regulator with Built-in Pressure Gauge Series AWG20/30/40 How to Order 03 30 AWG G1 AWG20 AWG40 Option Body size Description 0.02 to 0.2 MPa setting Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard With drain guide Non-relieving Drain cock with barb fitting: 6 x 4 nylon