3 Port Air Operated Valve Series SYJA300 1

VH Base mounted VHS Caution Pilot Pressure Range For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 Body ported Pilot pressure (MPa) Pilot pressure range 0.5 Series SYJA700 0.4 JIS Symbol 0.3 SYJA512 4 SYJA712 4 SYJA522 4 SYJA722 4 0.2 (A) 2 (A) 2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) 1 (P) 3 (R) 1 (P) 3 (R) N.C. N.O.

Polyurethane Tubing Series TU/TIUB  — 20 m roll  — 100 m roll Model/Specifications For general pneumatic tubing — Option — Manufactured upon receipt of order (Please consult with SMC.) Flexible Tubing size Polyurethane tubing Metric size (Series

(mm) 2 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 Burst Pressure Characteristics Curve and Operating Pressure Tubing I.D.

ISG

Dimensions 1.3: Power supply for neon light 4: Common 5: Normally closed 6: Normally open b point (4-5) becomes OFF. a point (4-6) becomes ON.

VY511, VYU5

15 AMR 6 37.5 52.7 67.8 75.3 77.8 100 AWM AWD ITV Replacement parts VBA Part No.

-- NCM seies

D-864 Bone Sizes Rod Boot o75 -%', 088 -',6' 106 -1%6" 125 -114" 't50 -1%' J -Nylon K -Neoprene Astuation -Double Acting S -Spring Return T -Spring Extend srror,.rrn"r, Sirokg/Hundrlh ol an lnch Cushion' C -Rubber Bumper Note: Min. Strokes for Auto Switch Cylinders page 5. *Rubber Bumpers are no additional cost on 7s" & 174" bore size cylinderg. Thy are options on the other bore sizes.

FR Soft Nylon Tubing Series TRS Flame Resistant (Equivalent to UL-94 Standard V-0)

Such vessels require EC type examination and then CE marking. 15-18-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

VZ1000

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VK VZ1120--M5 (Piping: 4 x 1 m) VZ VF AS1301F-M5-04/AN120M5 AS1301F-M5-04/AN120-M5 Speed controller/Silencer VFR

Exhaust Cleaner for Clean Rooms AMP Series

7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Information

Note 6) Outlet temperature when the circulating fluid flow is rated flow, and the circulating fluid outlet and return port are directly connected. Installation environment and the power supply are within specification range and stable. Note 7) The capacity at the Thermo-chiller outlet when the circulating fluid temperature is 20C.

Vacuum Unit Series ZK2

(signal to stop vacuum not needed) Note 6) When the digital pressure switch for vacuum with energy saving function is selected, select K for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications. Note 7) Cannot be selected for vacuum pump system.

SY3000-OMH0002

No.SY3000-OMH0002 SY V100 / -2,3 -4,5 -4,5 -6 -6 -6 -6 -7 -7 -7 -814 -15,16 -1No.SY3000*-OMH0002 ISO/IEC) (JIS) 1) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

VFR6000-OMQ0001

No.VFR6000-OMQ0001 VFR6000 / -2,3 -4,5 -4,5 -5 -5 -5 -6 -6 -6 -7 -8,9,10 -11 -12 -1VFR6000-OMQ0001 ISO/IEC) (JIS) 1) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

VT317-OMH0003

No.VT317**-OMH0003-A 3 / / VT/O 317 -2, 3 / -4 -5 -5 -5 -5 -6 -6 -6 -79 -10,11 1 VT317**-OMH0003-A 1) 2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

EX600-SPRA_eng

(default setting) Number of occupied valve 8 outputs Number of occupied valve 16 outputs Number of occupied valve 24 outputs Number of occupied valve 32 outputs Configuration X10 2 0 9 0 0 Mark C on the unit Mark B at cable end Mark A at cable end : : Address (1) Setting of the terminal resistor X1 Content 3 4 1 2 5 0 9 1 0 8 7 : : Content 9 6 5 x10 x1 0 5 4 1 2 3 0 (default setting) Node

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

AMR3000 AMR4000 AMR5000 AMR6000 Model Model name Bracket 13576 13556 13587 13568 (5)(6) G36-1001 G46-1002 Pressure gauge 1.0 MPa Accessory (Option)/Part No.

Large blow and

[MPa] ZH30-X185 ZH40-X185 ---7 ---7 3,500 5,000 Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] 4,500 ---6 ---6 3,000 Discharge flow rate 4,000 Discharge flow rate Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Vacuum

Vacuum Saving Valve

Example of Selection from Minimum Operating Flow 100 Example) Vacuum saving valve used: ZP2V-A8-05 From Table 1, Q2 can be calculated as 5.0 l/min (ANR). 90 31 {l/min (ANR)} 5 {l/min (ANR)} 80 N = 6 (unit) Vacuum pressure (kPa) 70 Q2 = 5.0 l/min (ANR) 60 Table 1.

AMF

6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series AMF Dimensions AMF450 to AMF850 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8 1 2 , AMG350 3 4 1 2 3 4 , AMG450 1 1 1 1 AMG550 AMG650 3 4 1 2 , , 14-20-6 5 Water Separator Series AMG Dimensions