MHF2

6, !9 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit no. Description Contents MHF2-20D2 MHF2-20D1 MHF2-20D MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002-2 MHF-A2002-1 MHF-A2002 Finger assembly e, r, t, y, !4, !6, !

MLGP

6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

MLGP

6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

58

With n pcs. 35 100 110 D-A3 D-G39 D-K39 110 + 30(n 2) (n = 2, 4, 6, 8) 110 + 100(n 2) (n = 2, 4, 6, 8) 35 + 30(n 2) Different surfaces 100 + 100(n 2) Same surface 15 110 With 1 pc. Different surfaces Same surface 35 55 110 110 + 30(n 2) (n = 2, 4, 6, 8) 110 + 50(n 2) (n = 2, 4, 6, 8) 35 + 30(n 2) Different surfaces D-A44 55 + 55(n 2) Same surface 15 110 With 1 pc.

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A #2 !0 !9 @0 @1 #1 A' Ball bushing bearing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 Slide bearing y Long stroke 100 @7 80, 100 View A-A Component Parts Component Parts Description No. Description No.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

(mm) Dimensions G H J K A B C D E F L M N P Q R V Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 4 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Weight (g) Weight (g) M1 d M1 D1 D2 L2 L1 D2 D1 L2 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Tie-rod Type Hydraulic Cylinder

4, 6, 8 ) 80 + 30 (n 2) (n = 2, 4, 6, 8 ) 35 + 30 (n 2) (n = 2, 3, 4 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) 100 + 100 (n 2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 Different surfaces 100 + 100 (n 2) (n = 2, 3, 4 ) Same surface 1 pc. 75 80 90 10 75 75 80 80 Different surfaces 35 55 90 90 90 + 30 (n 2) (n = 2, 4, 6, 8 ) Same surface 75 + 30 (n 2) (n = 2, 4, 6, 8 ) 80 + 30 (n 2) (n = 2, 4, 6,

ISO Standard Hydraulic Cylinder

7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 CHN CHM CHS CHS CH2 CHA !0 q w !2 !

CEx-OMI0064

CE*OMI0064-C CEU5 1 . 1 2 . 4 2-1 . 4 2-2 . 4 3 . 5 4 . 7 5 . 9 6 . 10 6-1 . 10 6-2 . 10 6-3 . 11 6-4 . 11 6-5 RS-232C . 11 6-6 . 12 7 . 13 7-1 . 13 7-1-1 . 13 7-1-2 . 13 7-1-3 . 14 7-1-4 . 15 7-2 . 16 7-3 . 20 7-3-1 . 20 7-3-2 . 20 7-3-3 . 20 7-3-4 No. . 20 7-3-5 . 21 7-3-6 . 22 7-3-7 . 23 7-4 (E2ROM) . 25 8 RS-232C . 26 8-1 . 26 8-2 . 26 9 BCD .

Electric Slide Table / High Precision Type 《 AC servo motor 》

-V5 LECYU2-V5 V6 AC servo motor 100 16 L Left side parallel V7 200 25 LECYM2-V7 LECYU2-V7 (Absolute encoder) (6)Motor option (5)Storke [mm] (4)Lead [mm] Size Size Nil Without option 16 25 16 25 * B With lock 50 12 16 (20) 100 6 8 (10) 150 *The values shown in ( ) are the lead for size 25 parallel mounting types.

M Series

plating) M-01H-6, M-5H-6 M-5HL-6, M-5HLH-6 7.

EXxx-OMQ0016

System diagnostic status1 7 6 5 4 3 2 1 0 Byte 1 Bit No.

LEYx-OMZ0015

Note 6) Only when the motor option, "with lock", is selected.

3 Port Solenoid Valve Metal Seal Series VZ200 1

6 Pilot valve assembly !

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model ZX 10 13 16 20 25 32 40 50 10 16 25 40 10 13 16 20 25 32 40 50 4 6 8 6 8 2. 6 4. 8 7 9 7 9 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 19. 5 19. 5 19. 5 19. 5 20. 5 20. 5 ZR 36. 5 36. 5 36. 5 36. 5 37. 5 37. 5 DQ HQ HP 2. 6 4. 8 7 9 12 21 44 15 21 42 18 12 24 45 18 25 46 7 9 12 25 46 15 18 29 50 ZM ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 19. 5 19. 5 19. 5 19. 5 21. 5 20. 5

Compact Vacuum Unit

(4) 2.9 14.5 psi (0.1 MPa) (20) 0.07 (2) 0 0 0 0.07 (2) 0.14 (4) 0.21 (6) 0.28 (8) 0 4 2 8 6 10 Suction flow SCFM (L/min (ANR)) Needle opening [rotations] The actual suction flow at the point of suction varies depending on the vacuum pumps piping conditions.