5 to 50C Note 1)Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)5.5 MPa?5 to 50C Note 1)20 times/minVertical upwards1/2?8.7 ?861/83.180
1 2 , 3 4Air (Inert gas)1.5 MPa1.0 MPa0 to 50C (With no condensation)0.05 s or less3% F.S.3% F.S.0.5% F.S.3% F.S. or lessNot required (Use turbine oil Class 1, ISO VG32, if lubricated.)1.4
(Inert gas)1.5 MPa1.0 MPa0 to 50C (With no condensation)0.03 s or less3% F.S.3% F.S.0.5% F.S.
10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?
3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?
3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?
5 to 50C Note 1)Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)5.5 MPa?5 to 50C Note 1)20 times/minVertical upwards1/2?8.7 ?861/83.180
5 to 50C Note 1)Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)10.5 MPa?5 to 50C Note 1)20 times/minVertical upwards1/2?9.5751/83.180
5 to 50C Note 1)Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)5.5 MPa?5 to 50C Note 1)20 times/minVertical upwards3/4?10.6 ?1101/45.6100