Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer

IDX-OM-W029

IDX-OM-W029 5 5 5-1 3 ON OFF () 3 2 R T 5-2 600mm 1 5-2 5-2 10% 5-2 () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W029 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W029 5 5-2 (IDU55E,IDU75E) 1-1 5-1 OFF IDU22E,55E,75E OFF IDU55E IDU75E () ON IDU55E,75E OFF ON IDU Series 5-2 5 3 IDX-OM-W029 6 6 6-1 IDU22E IDU37E IDU55E IDU75E 3/min (ANR)( 1)

IDX-OM-W035

3 ON OFF 3 2 R T () 5-2 600mm 1 5-2 5-2 10% 5-2 () 60cm 1 10% 3 IDFB Series 5-1 5-1 IDX-OM-W035 5 () 60cm 1 2 INOUT IN OUT IDFB Series 5-1 5-2 IDX-OM-W035 5 5-2 (IDFB55E,75E) (IDFB55E, 75E) 1-2 5-1 OFF OFF () ON OFF () ON IDFB Series 5-2(IDFB55E,75E) 5-3 IDX-OM-W035 6 6 6-1 IDFB22E-11 IDFB22E-23 IDFB37E-23 IDFB55E-46 IDFB75E-46 107SCFM 161SCFM 226SCFM 300SCFM

IR1000/2000/3000

AL 14-5-21

E-P HYREG ® Series VY1 1

VY1B0-5 VY120-5 1 V V V 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 V V V 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 2 2 2 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to page 17-6-3 for Safety Instructions and 17-5-59 to 17-5-61 for High Purity Chemical Valve Precautions.

CNA

For details, refer to page 9-15-40. 9-7-26 27 Series CNAW Cylinder with Lock Double Acting, Double Rod Construction #8 t #5 @7 e !6 !0 u @5 i !5 !1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL CL1 MLGC #1 @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

CNA

0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

2 4 1/8 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" 1/4 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 5/16" One-touch fitting for 3/8" 1/4 3/8 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 One-touch fitting for 5/16" One-touch

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

EX500-GPR1A.eng

Ground 4 +24V 2 +24V Shield 5 Shield N.C. 3 2 N.C. 2 N.C. 3 0V 1 0V 5 4 1 1 Internal circuit 8 0V 7 +24V 6 0V 5 +24V 4 TD 3 TD+ 2 RD 1 RD+ 8 0V 7 +24V 6 0V 5 +24V 4 TD 3 TD+ 2 RD 1 RD+ COM D COM A Common to IN side and OUT side Connect the communication cable with M12 connector to the M12 reverse communication connector.

CHKD/CHKG

CHS CH2 Minimum Auto Switch Mounting Stroke CHA (mm) Related Products D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number DD-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 4.5 4.5 4 7 5 5.5 7.5 11 D-Y59/Y69 D-Y7/Y7V

70astamb1

5 5 5 6 D-Y7BAL 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not included.

mb1

5 5 5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 4 4 5 9 12 14 15 10.5 11.5 17 6-7-20

IDU/IDF

IDF-TR1500-6 IDF-TR1500-7 IDF-TR1500-5 IDF-TR1500-6 IDF-TR1500-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Part No.

MB1

5 !6 !7 !8 !

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs. 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 5 150 600 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult P/A.

3

(PF2A7H: 0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) Monitor unit 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) 2% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 1% F.S. (Fluid: Dry air) Analog output: 3% F.S. 1% F .S. (PF2A70, PF2A7H) 2% F .S. (PF2A71) 1% F.S. (Fluid: Dry air) Analog output: 5% F.S. Monitor unit 0.1% F.S.

SMC Electronic Switch Series Variations

F.S. 5% F.S.