Title not found

/4 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 25 180 1-1/4 1-1/2 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 30 240 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 3 40 300 1-1/2 2 2 2 2 2-1/2 2-1/2 3 3 50 360 1-1/2 2 2 2 2-1/2 2-1/2 2-1/2 3 3 60 450 2 2 2 2-1/2 2-1/2 3 3 3 3-1/2 75 600 2 2-1/2 2-1/2 2-1/2 3 3 3 3-1/2 4 100 750 2 2-1/2 2-1/2 3 3 3 3-1/2 3-1/2 4 125 Pneumatic Pressure Loss Figures in the table below are approximate

Air Fittings & Tubing

KQY Male run tee KQY 1 4 1 4 The male thread for piping drastically cuts piping manhours 3 8 3 8 1 2 1 2 1 8 1 8 1 4 1 4 Branch Y KQU Branch Y KQU 3 8 3 8 1 2 1 2 1 8 1 8 Extended male elbow KQW Extended male elbow KQW 1 4 1 4 3 8 3 8 1 2 1 2 1 8 Refer to the catalog No.

HRX-OM-Z002

14.5 to 18.5 Rc1/2 Communication cable entry Electric wire diameter 6.5 to 10.5 Facility water outlet port Rc1/2 Circulating fluid outlet port(CH1) Rc1/2 Facility water inlet port Rc1/2 Drain port Rc1/4 Caster with stopper Fig. 2-2 Name of each part Table 2-2 Accessories Operation Manual 2 copy (English 1 pc. / Japanese 1 pc.)

A_HEC-OM-K001

Air is sucked in from the controller side and discharged through the back via this fan. (9) Fan (Outlet of air) 2.1 Temperature Controller 2-1 A_HEC-OM-K001-1.7 Chapter 2 Description and Function of Each Part 2.2 Heat Exchanger (5) (6) (8) (2) (7) (4) (1) (3) Fig.2-2 Heat Exchanger Table 2-2 Heat Exchanger No. Name Description Inlet port of chemicals.

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

HEC_W-E

TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL

100

2 !3 !

Large Size Vacuum Module: Series ZR

X, Y, Z directions, for 2 hours each 2% F.S.

VZ3000

VFS F: With foot bracket (2 position single type only) 1 VS4 Body option 0: Individual exhaust for the pilot valve VQ7 U: With silencer 2 position double EVS 2 K: With foot bracket and silencer (2 position single only) VFN 3(R) port PE port 3 position closed center 3: Common exhaust type for main and pilot valve Note) The bracket and silencer are not assembled. 3 4(A), 2(B) port size M5

HRX-OM-I051

Brake lever Caster w/ brake (2 pcs. on the front) M12 anchor bolt M8 nut (2 pcs.)

4-channel Flow Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

Multi-channel Digital Sensor Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

AC Servo Motor Driver (SSCNET /H Type)

1 EDB 2B.2 Encoder counter error 2 EDB -68- Alarm reset Stop CPU reset Power off on Error reset No.

IDX-OM-X004

/ Compliance Requirements . i 5 Chapter 1 Name of each Parts 1 1 Name of each Parts . 1 1 Chapter 2 Transportation / Installation 2 1 Transportation . 2 1 2 2 Installation . 2 1 2 2 1 Location . 2 1 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Electric wiring . 2 3 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 D5 D6 L1 L2 L3 5/32** 5/32 5/32 5/32 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 1/2** 1/2** 1/2** 1/2 1/2 1/2 5/8** 1/4 5/32 5/32 5/32 3/8 1/4 1/4 1/4 1/4 1/4 3/8 3/8 3/8 1/4 3/8 3/8 1/2 1/2 1/2 5/8 1/4-18 1/16-18 1/8-27 1/4-18 1/4-18 1/8-27 1/4-18 3/8-18 1/4-18 3/8-18 1/4-18 3/8-18 1/2-14 1/2-14 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 KV2Y03-07-35S KV2Y03

ISA2

With regulator + 2 port solenoid valve With 2 port solenoid valve 16-8-2 3 Air catch sensor Series ISA2 Optimum position is known at a glance.

Digital Pressure Switch ( compatible)

For OUT2, all "1" in the chart will be changed to "2".

PFxx-OMY0005

OUT2 17 OUT output bit Accumulated 1 32 Accumulated 2 33 Flow rate 1 34 Flow rate 2 35 Connected with hardware output SW output bit (Not connected as OUT2 does not have the hardware) Temperature 1 36 Temperature 2 37 Pressure 1 38 Pressure 2 39 Pulse output 2 65 This is valid only when the output object of OUT2 is pulse output.

High-precision Digital Pressure Switch ( compatible)

Name Lead wire colour Function 1 DC(+) Brown 12 to 24 VDC 2 OUT2 White Switch output 2 3 DC(-) Blue 0 V 4 OUT1 Black Switch output 1 Used as IO-Link device No.