IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

90

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

MNB

, PLC 100 V, 200 V Yes Yes 12 V Terminal conduit PLC 24 V 2-wire 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 24 V Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication

Rotary Actuator

12 V CRB2F<30 P211080-2 Relay, $ $ $ Grommet 24 V 5 V,12 V 5 V,12 V,24 V IC Vinyl parallel cord PLC circuit Reed auto switch Oilproof heavy5 V,12 V, 5 V,12 V, $ $ $ 2-wire 100 V 24 V,100 V duty vinyl cord $ $ $ Vinyl parallel cord Made to Order (For details, refer to pages 19 to 23 ,29, 30.) Made to Oilproof heavy$ $ $ 100 V Order duty vinyl cord ? $ $ ?

Fieldbus system EtherNet/IP TM compatible SI unit

Upper and lower setting limit of user setting Analogue output Settable range during measurement range communication error or idling (Range) (Lwr_Lmt) (Upr_Lmt) (Fault_MA) (Idle_MA) 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0.00 to +10.50 V 0..5 V 0.00 to + 5.22 V +0.03 to +5.25 V 0.00 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V +0.75 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

90

or less Max. 28 V, 80 mA Residual voltage: 2 V or less Voltage output type: 1 to 5 V Output impedance: Approx. 1 k The FUNC terminal is connected when using the copy function.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

0.5

Ground the F.G. cable with a resistance of 100 or less +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V 0 V 0 V DC/DC Power supply 24 VDC Power supply 24 VDC Blue (2 pcs.) 0 V 0 V 0 V DC/DC 0 V Blue (2 pcs.) 0 V 0 V F . G. F . G.

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

3 Product image Socket Socket Plug Plug Socket For DeviceNetTM (Plug, A-coded) Number of functional poles M12: 5 pins Key type A-coded (Normal key) DeviceNetTM / CANopen2 5 3 4 4 3 5 1: DRAIN: NC 2: V+: NC 3: V: NC 4: CAN H 5: CAN L 1: DRAIN 2: V+ (Red) 3: V (Black) 4: CAN H (White) 5: CAN L (Blue) 1: 2: 3: CAN GND 4: CAN H 5: CAN L 1 2 Pin assignment 2 1 Plug, A-coded Socket, A-coded (

Fieldbus system CC-Link compatible SI unit

(Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..5 V 5.25 to + 5.22 V 5.22 to +5.25 V -20..20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA -52No.EX-OMN0034

Step Motor Controller

Control circuit power supply (24 V) L11 Control circuit power supply (0 V) L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) Servo motor power (W) Connect to motor cable (U, V , W) U V W V W 60 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAm-m 2 m or less Note 5) PLC FX3U-mmMT/ES (Manufactured by