Stations: 9 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: None, Option 2: W (IP65 Protection Compatible)

Stations: 11 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: None, Option 2: W (IP65 Protection Compatible)

Stations: 5 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: SD (Built-in Silencer, Direct Exhaust from D Side)

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting)

Stations: 7 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting)

Stations: 8 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: SD (Built-in Silencer, Direct Exhaust from D Side), Option 2: W (IP65 Protection Compatible)

Stations: 9 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: SD (Built-in Silencer, Direct Exhaust from D Side)

Stations: 11 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting)

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: None, Option 2: W (IP65 Protection Compatible)

Stations: 8 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: SD (Built-in Silencer, Direct Exhaust from D Side)

Stations: 4 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting)

Stations: 4 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: None, Option 2: W (IP65 Protection Compatible)

Stations: 10 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting)

Stations: 10 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: D (D Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: None, Option 2: W (IP65 Protection Compatible)

Stations: 9 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: B (Bottom Ported Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: D (D Side Mounting)

KFx-OMY0034

(mm) 12x10 16x13 Series Tubing material 4x 2.5 4x 3 6x 4 8x 6 10x7.5 10x8 12x9 TH FEP TL Super PFA TLM PFA TD Modified PTFE TQ Special fluoropolymer T Nylon TS Soft nylon TU Polyurethane TPH Polyolefin TUS Soft polyurethane TUH Hard polyurethane (High pressure) TPS Soft polyolefin TAS Antistatic soft nylon TAU Antistatic polyurethane 10 - Table of applicable tubings (inch size

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

IC

0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !

Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: CM1 (JXCM1 CC-Link, Direct Input Type), I/O Cable Length for LEC: Without Cable, Controller Mounting: 7 (Screw Mounting), Communication Plug Connector or I/O Cable Length for JXC: T (T-branch, for DeviceNetâ„¢ or CC-LInk)