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Connector C (Terminal no.)

2/3 Port Valve

Ambient and Fluid Temperature Fluid temperature C Ambient temperature C (3) High temp. water (D, E, N, P) (3) High temp. oil (D, N) Temperature Power Water (Standard) Air (Standard) Oil (Standard) 99 (4) 100 (4) 80 60 10 60 40 40 60 60 40 1 AC DC AC/DC Max. Material No.

MY1

Series: Bore size 10 16 20 25 32 40 50 63 80 100 M C Slide bearing guide type Cam follower guide type Stroke adjusting unit Combination Symbol Mounting pcs.

SX

Model/Series SX7000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics (1) Port size Weight (g) (2) Valve model Type of actuation L plug connector M plug connector C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Grommet Single Double Closed center Exhaust center Pressure center 222 (100) 223 (101) 229 (107) 231 (109) 0.41 1.1 4.1 0.29 1.0 4.1 2 position 0.43 0.80 2.6 0.41 0.72 3.0 SX740--

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Auto switch mounting surface Bore size (mm) 12 16, 20 32, 40, 50 Port side Port side C A C A B B Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch model Port side A, B, C side A, B, C side Only auto switch mounting rail surface qBQ-2 wBQ2-012 Two kinds of auto switch mounting brackets are used as a set. qBQ-1 wBQ2-012 Two kinds of auto switch

LG1H

Positioning distance (mm) 1000 500 100 10 1 10 100.5 50.5 10.5 1.5 0.5 100 10.5 5.5 1.5 0.6 0.5 Speed (mm/s) 500 2.7 1.7 0.9 0.6 0.5 1000 1.9 1.4 0.9 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions.

Cylinder with Lock Series CNS

500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 2000 600 CNS 500 160 160 CLS 140 400 1000 140 700 800 900 CLQ 125 320 Load mass: m (kg) Load mass: m (kg) 125 300 RLQ 600 500 MLU 400 200 300 MLGP ML1C 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm

C95Series

StroKe .zz ' (mm) l'Mg& , B' ~FD FT rX" Fv Ft -, -. , 32 152 -SIlO 50 7 -SIlO 55 9 ' -600 70 9 -600 60 9 10 64 32 79 40 ' 169 SO 167 10 72 36 90 12 90 45 11 0 12 100 50 120 63 ~:;; 202 80 ;" 230 -750 100 12 16 126 63 153 100 t! 750 120 14 16 245 FT FX 150 75 178 ZZ .. $ lrOke F2 Single rear clevls / (C) Sing le rear clevis (mm) lJ, :.am ~A !!CD'" ~~~I ~::ri!

51

100 N JCM CDG3 L 100 M9BW N 25 C With auto switch CM2 With auto switch (Built-in magnet) CM3 Made to Order For details, refer to page 366.

CE

bore size (mm) D C d H B C D Part no.

CE

bore size (mm) D C d H B C D Part no.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

100 kPa to 100 kPa 100 kPa 100 kPa 0 to 1 MPa 0 1 MPa 0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa 50 kPa 1 0.6 4 ZSE ISE A C B A B Pressure Pressure ZSP Dimensions PS PSE56, PSE5601 02 N01 N02 ISA A 11.5 3025 37.5 24 5.5 30 24 PSE 14 B 5.1 20 5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to all PSE56 models. 24 PSE56-C01 PSE56-A2 A 24 B B PSE56-B2 (

0.4

L8 = 16n + 118.5 100 Drawing shows a SC case.

Rotary Table/Rack & Pinion Style Series MSQ

Positioning pin hole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a e is -c d w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w o 0 u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n g e 5 9 ra With adjust bolt

CQS

Body option Cylinder stroke (mm) Nil C M Standard With rubber bumper Rod end male thread With rubber bumper Rod end female thread (Standard) Standard stroke (mm) Bore size (mm) Long stroke (mm) C With rubber bumper Rod end male thread 5, 10, 15, 20, 25, 30 35, 40, 45, 50, 75, 100 CM 12, 16 Combination of body options (CM) is available.

HRX-OM-X010

HRZ***-WS-F : 110 deg C HRZ***-W1S-F:100 deg C HRZ***-W2S-F:80 deg C HRZ008-L/L1-F :60 deg C 10 Return High Temp WRN Continued Check the circulating fluid flow rate, load specification. The temperature of the circulating fluid exceeded your set value.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2C MY2C/m1 MY2C/m2 MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight Nm Load weight Nm Load weight Nm MY2C40 MY2C40 MY2C40 10 10 10 MY2C25 MY2C25 MY2C25 5 5 5 4 4 4 MY2C16 MY2C16 3 3 3 MY2C16 2 2 2 1 1 1 100 200 300 400500 1000 1500 100

Compact Rotary Actuator Series CRQ2

-XC12 to XC17, XC20/XC21 3 Change of Angle Adjustable Range (0 to 100, 90 to 190) CRB2 Symbol: C12 Symbol: C13 CRQ2B CDRQ2B X C12 Refer to How to Order on page 256. The rotation angle can be adjusted between 0 and 100. The rotation angle can be adjusted between 0 and 100.

CE

ML2B C J G5-S CV MVGQ Power supply voltage 12 to 24 VDC Abundant stroke variations Improved noise resistance CC RB Series Variations J System Configuration Series CE1 Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) Manufacturable stroke range Bore size (mm) DExtension cable Series CE1-R 250 400 500 300 175 200 150 125 100 75 100 50 75 25 50 25 12 12 equivalent 25 to