Common: -COM, No.of Pins: 20 Pin 2~16 Stations, Connector Mounting Position: U Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot Type: Standard Internal Pilot, A, B Port Size: 5/32" One-touch Fitting, Voltage Specification: -
Common: +COM, No.of Pins: 20 Pin 2~16 Stations, Connector Mounting Position: D Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot Type: Standard Internal Pilot, A, B Port Size: 1/4" One-touch Fitting, Voltage Specification: -
Common: +COM, No.of Pins: 20 Pin 2~16 Stations, Connector Mounting Position: U Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot Type: Standard Internal Pilot, A, B Port Size: 5/32" One-touch Fitting, Voltage Specification: -
Common: +COM, No.of Pins: 20 Pin 2~16 Stations, Connector Mounting Position: D Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot Type: Standard Internal Pilot, A, B Port Size: ΓΈ6 One-touch Fitting, Voltage Specification: -
Common: +COM, No.of Pins: 20 Pin 2~16 Stations, Connector Mounting Position: U Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot Type: Standard Internal Pilot, A, B Port Size: 1/4" One-touch Fitting, Voltage Specification: -
Swivels Hex 1 Hex 2 Port 1 Port 2 A Port 2 PS49JMJM-4-4 2.99 2.59 1.29 1.89 1.20 .75 .56 9/16-18 9/16-18 76.0 mm 65.7 mm 32.5 mm 47.9 mm 30.5 mm 19.0 mm 14.3 mm UNF-2A UNF-2A DIA B PS69JMJM-6-6 3.27 2.76 1.40 2.05 1.29 .88 .69 11/16-16 11/16-16 83.0 mm 70.0 mm 35.6 mm 52.0 mm 32.8 mm 22.2 mm 17.5 mm UN-2A UN-2A Hex 1 Hex 2 C PS89JMJM-8-8 3.52 2.93 1.74 2.60 1.73 1.12 .88 13/16-16 13/16-16 89.5 mm
Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3
2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Common: N (-COM), No.of Pins: G (20 Pin 2~16 Stations), Connector Mounting Position: D Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N3 (5/32" One-touch Fitting)
Common: N (-COM), No.of Pins: G (20 Pin 2~16 Stations), Connector Mounting Position: U Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N3 (5/32" One-touch Fitting)
Common: +COM, No.of Pins: G (20 Pin 2~16 Stations), Connector Mounting Position: D Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N7 (1/4" One-touch Fitting)
Common: +COM, No.of Pins: G (20 Pin 2~16 Stations), Connector Mounting Position: U Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N3 (5/32" One-touch Fitting)
Common: +COM, No.of Pins: G (20 Pin 2~16 Stations), Connector Mounting Position: U Side, Valve Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N7 (1/4" One-touch Fitting)